公开(公告)号：US20170343579A1

公开(公告)日：2017-11-30

申请号：US15541389

申请日：2016-01-04

Applicant: NORTHROP GRUMMAN LITEF GMBH

Inventor： PETER LEINFELDER

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B2201/0235 ,  B81B2203/051 ,  G01P15/0802 ,  G01P15/131 ,  G01P21/00 ,  G01P2015/0814

Abstract: The invention relates to an acceleration sensor (400) comprising an excitation mass (420) having excitation electrodes (430), which excitation mass is movably mounted over a substrate (410) along a movement axis (x) and comprising detection electrodes (440) which are permanently connected to the substrate (410) and allocated to the excitation electrodes (430). A first group of pairings (450) of excitation electrode (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a first direction (460). A second group of pairings (450) of excitation electrodes (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a second direction (465), which is opposite the first direction (460). The number of pairings (450) in the first group is equal to the number of pairings (450) in the second group. The averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the first group corresponds to the averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the second group.

公开(公告)号：US20180024160A1

公开(公告)日：2018-01-25

申请号：US15547312

申请日：2016-01-27

Applicant: NORTHROP GRUMMAN LITEF GMBH

Inventor： STEFAN KOENIG ,  PETER LEINFELDER

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0054 ,  B81B3/0059 ,  B81B2201/0235 ,  B81B2203/0163 ,  B81B2203/04 ,  B81B2203/051 ,  G01P15/131 ,  G01P2015/0814 ,  G01P2015/0862 ,  G01P2015/0882

Abstract: The invention relates to an acceleration sensor (100) having a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110), first trim electrodes (140) which are connected to the sensor material (120), and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material (120) is generated by the spring elements (130), and when the sensor material (120) is deflected, au electrostatic three acting on the sensor material (120), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim elements (150).