Invention Application
- Patent Title: VISUAL FEEDBACK FOR PROCESS CONTROL IN RTP CHAMBERS
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Application No.: US15675825Application Date: 2017-08-14
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Publication No.: US20170345693A1Publication Date: 2017-11-30
- Inventor: Kim VELLORE , Dinesh KANAWADE , Stephen MOFFATT , Aaron MILLER , Leonid M. TERTITSKI , Norman L. TAM , Michael LIU , Colin FOX
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
Embodiments of the present disclosure generally relate to methods and apparatus for visual lamp failure detection in a processing chamber, such as an RTP chamber. Visual feedback is facilitated through the use of a wide-angle lens positioned to view lamps within the process chamber. The wide-angle lens is positioned within a probe and secured using a spring in order to withstand high temperature processing. A camera coupled to the lens is adapted to capture an image of the lamps within the process chamber. The captured image of the lamps is then compared to a reference image to determine if the lamps are functioning as desired.
Public/Granted literature
- US10109514B2 Visual feedback for process control in RTP chambers Public/Granted day:2018-10-23
Information query
IPC分类: