Invention Application
- Patent Title: ACCELERATION SENSOR AND MOUNTING STRUCTURE OF ACCELERATION SENSOR
-
Application No.: US15536716Application Date: 2016-01-07
-
Publication No.: US20170345948A1Publication Date: 2017-11-30
- Inventor: Kiyomasa SUGIMOTO
- Applicant: DENSO CORPORATION
- Priority: JP2015-009654 20150121
- International Application: PCT/JP2016/000059 WO 20160107
- Main IPC: H01L29/84
- IPC: H01L29/84 ; G01P15/18 ; G01P15/125 ; B81B3/00 ; G01P15/08

Abstract:
An acceleration sensor includes: a semiconductor substrate that includes a support substrate and a semiconductor layer; a first-direction movable electrode; a second-direction movable electrode; a first-direction fixed electrode; a second-direction fixed electrode; and a support member. The acceleration sensor is configured to detect acceleration in a first direction in the surface direction of the semiconductor substrate and acceleration in a second direction orthogonal to the first direction and parallel to the surface direction. The first-direction movable electrode and the first-direction fixed electrode are provided such that an angle formed by an extended direction of the first-direction movable electrode and the first-direction fixed electrode and the second direction is sin−1(d/L)[deg], and the second-direction movable electrode and the second-direction fixed electrode are provided such that an angle formed by an extended direction of the second-direction movable electrode and the second-direction fixed electrode and the first direction is sin−1(d/L)[deg].
Public/Granted literature
- US09972724B2 Acceleration sensor and mounting structure of acceleration sensor Public/Granted day:2018-05-15
Information query
IPC分类: