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    PHYSICAL QUANTITY SENSOR AND METHOD FOR MANUFACTURING THE SAME
    1.
    发明申请
    PHYSICAL QUANTITY SENSOR AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    物理量传感器及其制造方法

    公开(公告)号：US20160223582A1

    公开(公告)日：2016-08-04

    申请号：US15022954

    申请日：2014-09-23

    Applicant: DENSO CORPORATION

    Inventor： Minekazu SAKAI ,  Kiyomasa SUGIMOTO

    IPC: G01P15/125 ,  H01L29/84 ,  H01L29/66

    CPC classification number: G01P15/125 ,  B81B7/0064 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0814 ,  H01L29/66007 ,  H01L29/84

    Abstract: In a physical quantity sensor, a contact part that is directly and electrically connected to an external circuit is formed in a support substrate, and the support substrate is maintained at a predetermined potential through the contact part. With this configuration, the support substrate is maintained at the predetermined potential without disposing an electrode in the interior of the semiconductor layer. For that reason, a processing precision can be restrained from being reduced in forming the movable electrode, and hence a detection precision can be restrained from being reduced.

    Abstract translation: 在物理量传感器中，在支撑基板上形成直接和电连接到外部电路的接触部分，并且通过接触部件将支撑基板保持在预定电位。 利用这种配置，在不在半导体层的内部设置电极的情况下，将支撑基板保持在预定电位。 因此，在形成可动电极时可以抑制加工精度的降低，能够抑制检测精度的降低。

    ACCELERATION SENSOR
    2.
    发明申请
    ACCELERATION SENSOR 审中-公开

    公开(公告)号：US20170192033A1

    公开(公告)日：2017-07-06

    申请号：US15314600

    申请日：2015-12-17

    Applicant: DENSO CORPORATION

    Inventor： Naoki YOSHIDA ,  Kiyomasa SUGIMOTO

    IPC: G01P15/125 ,  H01G4/005

    CPC classification number: G01P15/125 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/18 ,  H01G4/005 ,  H01G5/18

    Abstract: An acceleration sensor includes: a sensor section having a cap section; a sensing section including movable and fixed electrodes and movable and fixed electrode connecting sections; a peripheral section. The cap section includes a movable electrode through-hole electrode in a movable electrode through hole and a fixed electrode through-hole electrode in a fixed electrode through hole. The cap section further includes a movable electrode pad connected to the movable electrode through-hole electrode and a circuit device and a fixed electrode pad connected to the fixed electrode through-hole electrode and the circuit device. The movable electrode pad and the fixed electrode pad are adjacent to each other in a region of the cap section overlapped with the peripheral section in the stacking direction.

    PHYSICAL QUANTITY SENSOR
    3.
    发明申请
    PHYSICAL QUANTITY SENSOR 审中-公开
    物理量传感器

    公开(公告)号：US20170074653A1

    公开(公告)日：2017-03-16

    申请号：US15308866

    申请日：2015-06-11

    Applicant: DENSO CORPORATION

    Inventor： Takeru KANAZAWA ,  Minekazu SAKAI ,  Naoki YOSHIDA ,  Kiyomasa SUGIMOTO ,  Nobuaki KUZUYA

    IPC: G01C19/5621 ,  G01P15/125

    CPC classification number: G01C19/5621 ,  B81B7/02 ,  G01C19/5628 ,  G01C19/5783 ,  G01P15/125 ,  G01P2015/0814 ,  H01L41/053 ,  H01L41/0825 ,  H01L41/113 ,  H01L41/311 ,  H01L41/313

    Abstract: Within a housing portion in which a recessed portion is formed, a circuit board is arranged on the bottom surface of the recessed portion, through a first connecting member. An acceleration sensor is stacked on the circuit board, through a second connecting member. Hence, sections that function as three or more springs, i.e., an anti-vibration portion, the first connecting member, and the second connecting member, are situated between an angular velocity sensor and the acceleration sensor. For this reason, transmission of vibration of the vibrating element in the angular velocity sensor to the acceleration sensor can be restricted, and reduction in the detection accuracy of the acceleration sensor can be restricted.

    Abstract translation: 在形成有凹部的收纳部内，通过第一连接部件在凹部的底面上配置电路基板。 加速度传感器通过第二连接构件堆叠在电路板上。 因此，用作三个或更多个弹簧的部分，即防振部分，第一连接部件和第二连接部件，位于角速度传感器和加速度传感器之间。 因此，可以限制角速度传感器中的振动元件的振动传递到加速度传感器，能够抑制加速度传感器的检测精度的降低。

    ANGULAR VELOCITY SENSOR
    4.
    发明申请
    ANGULAR VELOCITY SENSOR 审中-公开
    角速度传感器

    公开(公告)号：US20170016724A1

    公开(公告)日：2017-01-19

    申请号：US15123756

    申请日：2015-04-17

    Applicant: DENSO CORPORATION

    Inventor： Minekazu SAKAI ,  Naoki YOSHIDA ,  Kiyomasa SUGIMOTO

    IPC: G01C19/5614 ,  H03H9/21 ,  G01C19/5628

    CPC classification number: G01C19/5614 ,  G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01C19/5642 ,  H01L41/042 ,  H01L41/047 ,  H01L41/1132 ,  H03H9/21

    Abstract: An angular velocity sensor includes a first substrate having first and second surfaces, a vibrating member disposed on the first substrate and including a drive piece capable of vibrating along the first substrate, a second substrate disposed on the first surface side, a first drive piece control electrode, a first drive piece auxiliary electrode, and a first drive piece control circuit applying a voltage to the first drive piece auxiliary electrode. The first drive piece control circuit adjusts, based on the capacitance generated between the first drive piece control electrode and the first drive piece auxiliary electrode, the voltage to be applied to the first drive piece auxiliary electrode to maintain a constant distance between the first drive piece control electrode and the first drive piece auxiliary electrode.

    Abstract translation: 角速度传感器包括具有第一和第二表面的第一基板，设置在第一基板上的振动部件，其包括能够沿着第一基板振动的驱动部件，设置在第一表面侧的第二基板，第一驱动部件控制部 电极，第一驱动片辅助电极和向第一驱动片辅助电极施加电压的第一驱动片控制电路。 第一驱动片控制电路基于第一驱动片控制电极和第一驱动片辅助电极之间产生的电容来调整施加到第一驱动片辅助电极的电压，以保持第一驱动片辅助电极之间的恒定距离 控制电极和第一驱动片辅助电极。

    ACCELERATION SENSOR
    6.
    发明申请
    ACCELERATION SENSOR 有权
    加速传感器

    公开(公告)号：US20160187371A1

    公开(公告)日：2016-06-30

    申请号：US14911288

    申请日：2014-09-01

    Applicant: DENSO CORPORATION

    Inventor： Minekazu SAKAI ,  Kiyomasa SUGIMOTO

    IPC: G01P15/125

    CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/082

    Abstract: In an acceleration sensor, a semiconductor layer is provided with a rod-shaped weight portion that passes through a center of a frame portion, extends in a second direction, and is connected to the frame portion through a first beam portion. A first-direction movable electrode and a second-direction movable electrode are provided on the weight portion. According to the above configuration, because a mass of the first- and second-direction movable electrodes can be applied to the vicinity of a center of the frame portion, and a rotational moment can be reduced. Thus, detection accuracy can be restrained from being reduced.

    Abstract translation: 在加速度传感器中，半导体层设置有穿过框架部分的中心的杆状重物部分，沿第二方向延伸，并且通过第一梁部分连接到框架部分。 第一方向可动电极和第二方向可动电极设置在配重部上。 根据上述结构，由于能够将第一方向和第二方向的可动电极的质量施加到框架部的中心附近，并且能够减小旋转力矩。 因此，可以抑制检测精度的降低。

    CAPACITIVE PHYSICAL QUANTITY SENSOR
    7.
    发明申请
    CAPACITIVE PHYSICAL QUANTITY SENSOR 有权
    电容式物理量传感器

    公开(公告)号：US20160131680A1

    公开(公告)日：2016-05-12

    申请号：US14890642

    申请日：2014-05-16

    Applicant: DENSO CORPORATION

    Inventor： Kiyomasa SUGIMOTO ,  Minekazu SAKAI

    IPC: G01P15/125 ,  G01P15/08

    CPC classification number: G01P15/125 ,  B81B2201/0235 ,  B81B2203/051 ,  B81C1/00166 ,  G01P15/0802 ,  G01P2015/0814 ,  G01P2015/088

    Abstract: A capacitive physical quantity sensor includes a first substrate, a movable electrode, a fixed electrode, and a second substrate. An auxiliary electrode is disposed on a portion of the second substrate to face the movable electrode and the auxiliary electrode has a facing area that faces the movable electrode. The facing area in a case where the movable electrode is displaced in one direction is different from the facing area in a case where the movable electrode is displaced in an opposite direction opposite to the one direction. The physical quantity is detected based on a capacitance, which is generated corresponding to the interval between the fixed electrode and the movable electrode, and a capacitance, which is generated corresponding to an interval between the facing area of the movable electrode and the auxiliary electrode.

    Abstract translation: 电容物理量传感器包括第一基板，可动电极，固定电极和第二基板。 辅助电极设置在第二基板的与可动电极相对的部分上，辅助电极具有面向可动电极的面对区域。 在可动电极沿与一个方向相反的方向移位的情况下，在可动电极沿一个方向移位的情况下的面对区域与面对区域不同。 基于对应于固定电极和可动电极之间的间隔产生的电容以及与可动电极和辅助电极的相对面积之间的间隔相应产生的电容来检测物理量。

    PHYSICAL QUANTITY SENSOR AND MANUFACTURING METHOD THEREFOR
    9.
    发明申请
    PHYSICAL QUANTITY SENSOR AND MANUFACTURING METHOD THEREFOR 审中-公开

    公开(公告)号：US20180095106A1

    公开(公告)日：2018-04-05

    申请号：US15537665

    申请日：2016-01-07

    Applicant: DENSO CORPORATION

    Inventor： Kiyomasa SUGIMOTO ,  Naoki YOSHIDA

    IPC: G01P15/125 ,  H01L29/84 ,  B81B3/00 ,  B81C3/00

    Abstract: A physical quantity sensor includes: a detection element that outputs a sensor signal in accordance with a physical quantity; and a mount member. The detection element includes a sensor portion that has a first surface, includes a movable electrode, and a fixed electrode, and outputs the sensor signal, and a cap portion that has a first surface and is bonded with the sensor portion. Each of the first surface of the sensor portion and the first surface of the cap portion is mounted on the mount ber, and the detection element detects the physical quantity. An electrode, which is connected with the movable electrode and connected with a circuit portion, and an electrode, which is connected with the fixed electrode and connected with the circuit portion, are provided on a side surface continued to the first surface of the cap portion.

    ACCELERATION SENSOR AND MOUNTING STRUCTURE OF ACCELERATION SENSOR
    10.
    发明申请
    ACCELERATION SENSOR AND MOUNTING STRUCTURE OF ACCELERATION SENSOR 有权

    公开(公告)号：US20170345948A1

    公开(公告)日：2017-11-30

    申请号：US15536716

    申请日：2016-01-07

    Applicant: DENSO CORPORATION

    Inventor： Kiyomasa SUGIMOTO

    IPC: H01L29/84 ,  G01P15/18 ,  G01P15/125 ,  B81B3/00 ,  G01P15/08

    CPC classification number: H01L29/84 ,  B81B2201/0235 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0842

    Abstract: An acceleration sensor includes: a semiconductor substrate that includes a support substrate and a semiconductor layer; a first-direction movable electrode; a second-direction movable electrode; a first-direction fixed electrode; a second-direction fixed electrode; and a support member. The acceleration sensor is configured to detect acceleration in a first direction in the surface direction of the semiconductor substrate and acceleration in a second direction orthogonal to the first direction and parallel to the surface direction. The first-direction movable electrode and the first-direction fixed electrode are provided such that an angle formed by an extended direction of the first-direction movable electrode and the first-direction fixed electrode and the second direction is sin−1(d/L)[deg], and the second-direction movable electrode and the second-direction fixed electrode are provided such that an angle formed by an extended direction of the second-direction movable electrode and the second-direction fixed electrode and the first direction is sin−1(d/L)[deg].

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