Invention Application
- Patent Title: INTERFERENCE OBSERVATION DEVICE
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Application No.: US15545356Application Date: 2015-12-14
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Publication No.: US20170356735A1Publication Date: 2017-12-14
- Inventor: Toyohiko YAMAUCHI , Hidenao YAMADA
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Priority: JP2015-016266 20150130
- International Application: PCT/JP2015/084917 WO 20151214
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01N21/45 ; G02B21/06 ; G01N33/483 ; G02B21/36

Abstract:
An interference observation apparatus includes a light source, a splitting beam splitter, a combining beam splitter, a beam splitter, a mirror, a beam splitter, a mirror, a piezo element, a stage, an imaging unit, an image acquisition unit, and a control unit. An interference optical system from the splitting beam splitter to the combining beam splitter forms a Mach-Zehnder interferometer. The mirror freely moves in a direction perpendicular to a reflecting surface of the mirror. The total number of times of respective reflections of first split light and second split light in the interference optical system is an even number.
Public/Granted literature
- US10209056B2 Interference observation device Public/Granted day:2019-02-19
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