Invention Application
- Patent Title: PHOTOSENSOR SUBSTRATE AND METHOD OF PRODUCING THE SAME
-
Application No.: US15539661Application Date: 2015-12-17
-
Publication No.: US20170373111A1Publication Date: 2017-12-28
- Inventor: ATSUSHI TOMYO , TADAYOSHI MIYAMOTO , KAZUHIDE TOMIYASU , KAZUATSU ITO
- Applicant: Sharp Kabushiki Kaisha
- Priority: JP2014-262402 20141225
- International Application: PCT/JP2015/085411 WO 20151217
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G01T1/24 ; H01L21/768 ; G01T1/20
Abstract:
A photosensor substrate (10) includes a plurality of sensor units (1). The sensor units (1) each include a switching element (2), a lower electrode (3) connected to the switching element (2), and a photoelectric conversion element (4). The photosensor substrate (10) includes lines (G and D) connected to the switching elements of the plurality of sensor units and led out of a sensor area (SA), and terminal parts (TG and TD) connected to the lines (G and D) led out of the sensor area (SA). The terminal parts (TG and TD) each include a protective layer (4a) overlapped with the line (G or D) led out of the sensor area and containing a material for the photoelectric conversion element (4), and a terminal conductor (6) connected to the line (G or D) via an opening (CH1) provided in the protective layer (4a).
Information query
IPC分类:
