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公开(公告)号:US20190115385A1
公开(公告)日:2019-04-18
申请号:US16090529
申请日:2017-03-30
Applicant: SHARP KABUSHIKI KAISHA
Inventor: HIROYUKI MORIWAKI , KAZUHIDE TOMIYASU , MAKOTO NAKAZAWA , FUMIKI NAKANO , WATARU NAKAMURA
IPC: H01L27/146 , G01T1/20
Abstract: A photoelectric converter of one aspect of the present invention is provided with an element substrate having a photodiode and a thin film transistor arranged in matrix form, an interlayer insulating film laminated on the thin film transistor, a first contact hole formed in the interlayer insulating film and reaching a surface of a source electrode of the thin film transistor, and a second contact hole formed in the interlayer insulating film and reaching a surface of a drain electrode of the thin film transistor, in which a source bus line and the source electrode of the thin film transistor are connected via the first contact hole, the drain electrode of the thin film transistor and a lower layer electrode of the photodiode are connected via the second contact hole, and the tapered part of the second contact hole has a gentler inclination than the tapered part of the first contact hole.
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公开(公告)号:US20200003702A1
公开(公告)日:2020-01-02
申请号:US16454635
申请日:2019-06-27
Applicant: SHARP KABUSHIKI KAISHA , NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Inventor: HIROAKI MIYOSHI , KAZUHIDE TOMIYASU , WATARU NAKAMURA , TAKESHI FUJIWARA
IPC: G01N23/04
Abstract: A nondestructive inspection apparatus includes an X-ray source, an imaging panel that detects an X-ray, and a shielding plate that shields the X-ray, and the imaging panel and the shielding plate have flexibility that allows to be curved.
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公开(公告)号:US20170373111A1
公开(公告)日:2017-12-28
申请号:US15539661
申请日:2015-12-17
Applicant: Sharp Kabushiki Kaisha
Inventor: ATSUSHI TOMYO , TADAYOSHI MIYAMOTO , KAZUHIDE TOMIYASU , KAZUATSU ITO
IPC: H01L27/146 , G01T1/24 , H01L21/768 , G01T1/20
CPC classification number: H01L27/14636 , G01T1/2018 , G01T1/241 , G01T1/247 , H01L21/76879 , H01L27/144 , H01L27/146 , H01L27/14658 , H01L27/14683 , H01L2924/0002 , H04N5/369 , H01L2924/00
Abstract: A photosensor substrate (10) includes a plurality of sensor units (1). The sensor units (1) each include a switching element (2), a lower electrode (3) connected to the switching element (2), and a photoelectric conversion element (4). The photosensor substrate (10) includes lines (G and D) connected to the switching elements of the plurality of sensor units and led out of a sensor area (SA), and terminal parts (TG and TD) connected to the lines (G and D) led out of the sensor area (SA). The terminal parts (TG and TD) each include a protective layer (4a) overlapped with the line (G or D) led out of the sensor area and containing a material for the photoelectric conversion element (4), and a terminal conductor (6) connected to the line (G or D) via an opening (CH1) provided in the protective layer (4a).
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公开(公告)号:US20190237692A1
公开(公告)日:2019-08-01
申请号:US16261457
申请日:2019-01-29
Applicant: SHARP KABUSHIKI KAISHA
Inventor: MAKOTO NAKAZAWA , KAZUHIDE TOMIYASU , FUMIKI NAKANO , YU NAKAMURA
CPC classification number: H01L51/448 , H01L27/1225 , H01L27/286 , H01L27/307 , H01L27/308
Abstract: The invention provides a technique inhibiting entry of moisture to an active matrix substrate included in an X-ray imaging device.An active matrix substrate includes, in each of the pixels, a photoelectric conversion element including a pair of electrodes and a semiconductor layer provided between the pair of electrodes, a first flattening film configured as an organic resin film and covering the photoelectric conversion element, and a first inorganic insulating film covering the first flattening film. The first flattening film and the first inorganic insulating film are provided to extend outside the pixel region. Outside the pixel region, the first flattening film is covered with the first inorganic insulating film to prevent exposure of the first flattening film.
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公开(公告)号:US20170357011A1
公开(公告)日:2017-12-14
申请号:US15541420
申请日:2015-12-25
Applicant: Sharp Kabushiki Kaisha
Inventor: KAZUHIDE TOMIYASU , SHIGEYASU MORI
IPC: G01T1/20 , H01L27/146 , G01N23/04
CPC classification number: G01T1/20 , A61B6/00 , A61B6/4208 , G01N23/04 , H01L27/14603 , H01L27/14612 , H01L27/14663 , H01L31/08
Abstract: An imaging panel (10) is provided that generates an image based on scintillation light obtained from X-ray having passed through an object. The imaging panel (10) includes: a substrate (40); a plurality of conversion elements (15) converting the scintillation light into charges; an insulating film (45, 46) having a plurality of conductive portions (47) that reach the conversion elements (15), respectively; and bias lines (16) formed on the insulating film (45, 46) so as to cover the conductive portions (47), the bias lines (16) being connected to the conversion elements (15) through the conductive portions (47), respectively, and supplying a bias voltage to the conversion elements (15). A dimension of each of the conductive portions (47) in a direction in which the bias lines (16) extend is greater than a dimension of each of the conductive portions (47) in a width direction of the bias lines (16).
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