公开(公告)号：US20170373111A1

公开(公告)日：2017-12-28

申请号：US15539661

申请日：2015-12-17

Applicant: Sharp Kabushiki Kaisha

Inventor： ATSUSHI TOMYO ,  TADAYOSHI MIYAMOTO ,  KAZUHIDE TOMIYASU ,  KAZUATSU ITO

IPC: H01L27/146 ,  G01T1/24 ,  H01L21/768 ,  G01T1/20

CPC classification number: H01L27/14636 ,  G01T1/2018 ,  G01T1/241 ,  G01T1/247 ,  H01L21/76879 ,  H01L27/144 ,  H01L27/146 ,  H01L27/14658 ,  H01L27/14683 ,  H01L2924/0002 ,  H04N5/369 ,  H01L2924/00

Abstract: A photosensor substrate (10) includes a plurality of sensor units (1). The sensor units (1) each include a switching element (2), a lower electrode (3) connected to the switching element (2), and a photoelectric conversion element (4). The photosensor substrate (10) includes lines (G and D) connected to the switching elements of the plurality of sensor units and led out of a sensor area (SA), and terminal parts (TG and TD) connected to the lines (G and D) led out of the sensor area (SA). The terminal parts (TG and TD) each include a protective layer (4a) overlapped with the line (G or D) led out of the sensor area and containing a material for the photoelectric conversion element (4), and a terminal conductor (6) connected to the line (G or D) via an opening (CH1) provided in the protective layer (4a).