Invention Application
- Patent Title: METHOD FOR MANUFACTURING A TRENCH CHANNEL FOR A VACUUM TRANSISTOR DEVICE AND VACUUM TRANSISTOR DEVICE
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Application No.: US15392539Application Date: 2016-12-28
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Publication No.: US20180005792A1Publication Date: 2018-01-04
- Inventor: Antonino Fiumara , Marcello Frazzica , Giuseppe Digrazia
- Applicant: STMICROELECTRONICS S.R.L.
- Priority: IT102016000067595 20160629
- Main IPC: H01J19/24
- IPC: H01J19/24 ; H01J9/02 ; H01J19/44

Abstract:
A method for manufacturing a microelectronic semiconductor device comprising the steps of: forming a trench in a body, the trench having side walls, a opening, and a bottom; forming a sacrificial layer in the trench; forming a recess in the sacrificial layer; forming a restriction structure between the sacrificial layer and the opening of the trench, defining a through hole for access to the sacrificial layer; completely removing the sacrificial layer through said through hole; and depositing a metal layer over the body, thus closing the opening of the trench and forming an electron-emission cathode tip.
Public/Granted literature
- US10102996B2 Method for manufacturing a trench channel for vacuum transistor device and vacuum transistor device Public/Granted day:2018-10-16
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