发明申请
- 专利标题: FinFET VARACTOR
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申请号: US15400201申请日: 2017-01-06
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公开(公告)号: US20180006162A1公开(公告)日: 2018-01-04
- 发明人: FEI ZHOU
- 申请人: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- 优先权: CN201610512157.1 20160701
- 主分类号: H01L29/93
- IPC分类号: H01L29/93 ; H01L29/66 ; H01L29/417 ; H01L29/10 ; H01L29/08 ; H01L29/06 ; H01L21/8234 ; H01L29/78 ; H01L21/768
摘要:
A varactor transistor includes a semiconductor fin having a first conductivity type, a plurality of gate structures separated from each other and surrounding a portion of the semiconductor fin. The plurality of gates structures include a dummy gate structure on an edge of the semiconductor fin, and a first gate structure spaced apart from the dummy gate structure. The dummy gate structure and the gate structure each include a gate insulator layer on a surface portion of the semiconductor fin, a gate on the gate insulator layer, and a spacer on the gate. The varactor transistor also includes a raised source/drain region on the semiconductor fin and between the dummy gate structure and the first gate structure, the raised source/drain region and the gate of the dummy gate structure being electrically connected to a same potential.
公开/授权文献
- US09985144B2 FinFET varactor 公开/授权日:2018-05-29
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