Invention Application
- Patent Title: KIT AND LAMINATE
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Application No.: US15712595Application Date: 2017-09-22
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Publication No.: US20180012751A1Publication Date: 2018-01-11
- Inventor: Yoshitaka KAMOCHI , Yu IWAI , Ichiro KOYAMA , Atsushi NAKAMURA
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2015-060077 20150323
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/304 ; C09J125/04 ; C09J5/06 ; C09J153/00 ; C09J121/00 ; C09J201/00

Abstract:
Provided are a kit and a laminate which are capable of suppressing residues derived from a temporary adhesive in manufacture of a semiconductor. The kit for manufacturing a semiconductor device includes a composition which contains a solvent A; a composition which contains a solvent B; and a composition which contains a solvent C, in which the kit is used when a temporary adhesive layer is formed on a first substrate using a temporary adhesive composition containing a temporary adhesive and the solvent A, at least some of an excessive amount of the temporary adhesive on the first substrate is washed using the composition containing the solvent B, a laminate is manufactured by bonding the first substrate and a second substrate through the temporary adhesive layer, one of the first substrate and the second substrate is peeled off from the laminate at a temperature of lower than 40° C., and then the temporary adhesive remaining on at least one of the first substrate or the second substrate is washed using the composition containing the solvent C, and the solvent A, the solvent B, and the solvent C respectively satisfy a predetermined vapor pressure and a predetermined saturated solubility.
Public/Granted literature
- US10580640B2 Kit and laminate Public/Granted day:2020-03-03
Information query
IPC分类: