Invention Application
- Patent Title: IMPRINT TEMPLATE MANUFACTURING APPARATUS
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Application No.: US15715966Application Date: 2017-09-26
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Publication No.: US20180016673A1Publication Date: 2018-01-18
- Inventor: Satoshi NAKAMURA , Kensuke DEMURA , Daisuke MATSUSHIMA , Masayuki HATANO , Hiroyuki KASHIWAGI , Chen KANG , Ganachev Ivan PETROV
- Applicant: SHIBAURA MECHATRONICS CORPORATION , TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Yokohama-shi JP Minato-ku
- Assignee: SHIBAURA MECHATRONICS CORPORATION,TOSHIBA MEMORY CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION,TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Yokohama-shi JP Minato-ku
- Priority: JP2015-074109 20150331; JP2016-062077 20160325
- Main IPC: C23C14/04
- IPC: C23C14/04 ; B29C33/38 ; G03F7/00 ; B29C59/02

Abstract:
According to one embodiment, an imprint template manufacturing apparatus includes a support unit, a vaporization unit, and an adhesion preventing plate. The support unit supports a template that includes a base having a main surface, and a convex portion provided on the main surface and having an end surface. A concavo-convex pattern to be pressed against a liquid material to be transferred is formed on the end surface. The support unit supports the template with the convex portion facing downward. The vaporization unit is located below the template on the support unit and configured to vaporize a liquid-repellent material. The adhesion preventing plate is located below the template on the support unit and configured to allow the liquid-repellent material vaporized to adhere to the side surface of the convex portion of the template and to prevent it from adhering to the concavo-convex pattern.
Information query
IPC分类: