Invention Application
- Patent Title: TEMPLATE FOR IMPRINT
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Application No.: US15720898Application Date: 2017-09-29
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Publication No.: US20180022016A1Publication Date: 2018-01-25
- Inventor: Satoshi NAKAMURA , Kensuke DEMURA , Daisuke MATSUSHIMA , Masayuki HATANO , Hiroyuki KASHIWAGI
- Applicant: SHIBAURA MECHATRONICS CORPORATION , TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Yokohama-shi JP Minato-ku
- Assignee: SHIBAURA MECHATRONICS CORPORATION,TOSHIBA MEMORY CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION,TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Yokohama-shi JP Minato-ku
- Priority: JP2015-074108 20150331
- Main IPC: B29C59/02
- IPC: B29C59/02

Abstract:
According to one embodiment, a template for imprint includes a base, a convex portion, and a liquid-repellent layer. The base has a main surface. The convex portion is provided on the main surface. The convex portion has an end surface on a side opposite to the main surface, and a concavo-convex pattern to be pressed against a liquid material to be transferred is formed on the end surface. The liquid-repellent layer is formed on at least the side surface of the convex portion so as to avoid the concavo-convex pattern. The liquid-repellent layer repels the liquid material to be transferred.
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