Invention Application
- Patent Title: PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT
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Application No.: US15788338Application Date: 2017-10-19
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Publication No.: US20180040454A1Publication Date: 2018-02-08
- Inventor: Ingo Mueller , Nicole Rauwolf , Christof Riedesel , Thomas Kemen , Joerg Jacobi , Arne Thoma , Markus Doering , Dirk Zeidler , Juergen Kynast , Gerd Benner
- Applicant: Carl Zeiss Microscopy GmbH
- Priority: DE102014008383.7 20140606
- Main IPC: H01J37/21
- IPC: H01J37/21 ; H01J37/28 ; H01J37/10

Abstract:
A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.
Public/Granted literature
- US09991089B2 Particle beam system and method for operating a particle optical unit Public/Granted day:2018-06-05
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