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公开(公告)号：US09991089B2
公开(公告)日：2018-06-05
申请号：US15788338
申请日：2017-10-19
发明人： Ingo Mueller , Nicole Rauwolf , Christof Riedesel , Thomas Kemen , Joerg Jacobi , Arne Thoma , Markus Doering , Dirk Zeidler , Juergen Kynast , Gerd Benner
CPC分类号： H01J37/21 , H01J37/10 , H01J37/28 , H01J2237/0435 , H01J2237/0492 , H01J2237/28 , H01J2237/31764 , H01J2237/31774
摘要： A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.
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公开(公告)号：US20180040454A1
公开(公告)日：2018-02-08
申请号：US15788338
申请日：2017-10-19
发明人： Ingo Mueller , Nicole Rauwolf , Christof Riedesel , Thomas Kemen , Joerg Jacobi , Arne Thoma , Markus Doering , Dirk Zeidler , Juergen Kynast , Gerd Benner
CPC分类号： H01J37/21 , H01J37/10 , H01J37/28 , H01J2237/0435 , H01J2237/0492 , H01J2237/28 , H01J2237/31764 , H01J2237/31774
摘要： A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.
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