Invention Application
- Patent Title: CHAMBER COMPONENT PART WEAR INDICATOR AND A SYSTEM FOR DETECTING PART WEAR
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Application No.: US15243282Application Date: 2016-08-22
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Publication No.: US20180052104A1Publication Date: 2018-02-22
- Inventor: Mats LARSSON , Kevin A. PAPKE
- Applicant: Applied Materials, Inc.
- Main IPC: G01N21/64
- IPC: G01N21/64 ; H01J37/32

Abstract:
The present invention generally relates method and part wear indicator for identifying an eroded chamber component in an etching or other plasma processing chamber. In one embodiment, a chamber component has a part wear indicator. The chamber component has a body. The body has a top surface and a bottom surface. A part wear indicator material is disposed in the chamber component body. The part wear indicator has a body. The body of the part wear indicator has a transparent first layer. A second layer has a tracer material disposed therein and wherein the first layer is closer to the top surface of the top surface than the second layer.
Public/Granted literature
- US10921251B2 Chamber component part wear indicator and a system for detecting part wear Public/Granted day:2021-02-16
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