Invention Application
- Patent Title: RECOVERY METHOD FOR ABRASIVE
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Application No.: US15556910Application Date: 2016-03-09
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Publication No.: US20180056483A1Publication Date: 2018-03-01
- Inventor: Chie INUI , Akihiro MAEZAWA , Yuuki NAGAI , Natsumi HIRAYAMA
- Applicant: Konica Minolta, Inc.
- Priority: JP2015-055772 20150319
- International Application: PCT/JP2016/057293 WO 20160309
- Main IPC: B24B57/00
- IPC: B24B57/00 ; B24B37/34

Abstract:
A method for collecting an abrasive from an abrasive slurry which has been used for polishing an object including silicon as a main component includes: (i) adding a solvent to the abrasive slurry; (ii) dissolving particles of the polished object among components of the polished object contained in the abrasive slurry; and (iii) filtering the abrasive slurry to collect the abrasive, in which the steps (i) to (iii) are carried out without a pH adjuster to remove components of the polished object to collect the abrasive.
Public/Granted literature
- US10286522B2 Recovery method for abrasive Public/Granted day:2019-05-14
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