- 专利标题: FLEXIBLE AND STRETCHABLE SENSORS FORMED BY PATTERNED SPALLING
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申请号: US15811265申请日: 2017-11-13
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公开(公告)号: US20180067064A1公开(公告)日: 2018-03-08
- 发明人: Stephen W. Bedell , Shu-Jen Han , Ning Li , Devendra K. Sadana
- 申请人: International Business Machines Corporation
- 主分类号: G01N27/04
- IPC分类号: G01N27/04 ; H01L49/02 ; H01L41/18 ; H01L27/08
摘要:
A material removal process referred to as spalling is used to provide flexible and stretchable sensors that can be used for healthcare monitoring, bio-medical devices, wearable electronic devices, artificial skin, large area sensing, etc. The flexible and stretchable sensors of the present application have high sensitivity that is comparable to that of a bulk silicon sensor. The flexible and stretchable sensors comprise single crystalline spring-like structures that couple various resistor structures together.