Invention Application
- Patent Title: ELECTRONIC COMPONENT TRANSPORT APPARATUS AND ELECTRONIC COMPONENT INSPECTION APPARATUS
-
Application No.: US15558771Application Date: 2016-02-03
-
Publication No.: US20180074119A1Publication Date: 2018-03-15
- Inventor: Daisuke KIRIHARA , Masami MAEDA , Toshioki SHIMOJIMA , Takashi YAMAZAKI
- Applicant: Seiko Epson Corporation
- Priority: JP2015-051772 20150316; JP2015-051778 20150316
- International Application: PCT/JP2016/000565 WO 20160203
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L21/673
Abstract:
An electronic component transport apparatus includes: an openable and closable first opening and closing portion; a first rotation support portion which supports the first opening and closing portion to be rotatable; a second opening and closing portion provided to be openable and closable in the first opening and closing portion; and a second rotation support portion which supports the second opening and closing portion to be rotatable. An area of the first opening and closing portion is greater than an area of the second opening and closing portion.
Public/Granted literature
- US10416231B2 Electronic component transport apparatus and electronic component inspection apparatus Public/Granted day:2019-09-17
Information query
