公开(公告)号：US20130205804A1

公开(公告)日：2013-08-15

申请号：US13765026

申请日：2013-02-12

Applicant: Seiko Epson Corporation

Inventor： Masami MAEDA ,  Toshioki SHIMOJIMA

IPC: F17C9/02

CPC classification number: F17C9/02 ,  G01R31/2867 ,  G01R31/2877

Abstract: A handler includes a storage tank which stores liquid nitrogen, supply channels which supply refrigerant from the storage tank to inner passages of a first shuttle, a valve which opens and closes the supply channel, and a heat exchanger which has vaporization chambers with larger flow path cross-sectional areas than those of the supply channels to vaporize liquid nitrogen within the vaporization chambers. According to this structure, the respective vaporization chambers are filled with nitrogen gas produced by preceding vaporization. Thus, pressure fluctuations produced by successive vaporization of liquid nitrogen can be reduced. Moreover, nitrogen gas is supplied to the respective inner passages. Accordingly, excessive cooling for part housing pockets can be prevented.

Abstract translation: 处理机包括存储液氮的储罐，将储罐中的制冷剂供给到第一梭子的内部通道的供应通道，打开和关闭供应通道的阀以及具有较大流路的蒸发室的热交换器 横截面积大于供应通道的横截面面积，以蒸发蒸发室内的液氮。 根据该结构，在各汽化室中填充有先前蒸发的氮气。 因此，可以减少由液氮的连续汽化产生的压力波动。 此外，氮气被供给到各个内部通道。 因此，可以防止部件壳体袋的过度冷却。

公开(公告)号：US20130206383A1

公开(公告)日：2013-08-15

申请号：US13756941

申请日：2013-02-01

Applicant: Seiko Epson Corporation

Inventor： Masami MAEDA ,  Toshioki SHIMOJIMA

IPC: F28F27/00

CPC classification number: F28F27/00 ,  G01R31/2867 ,  G01R31/2868 ,  G01R31/2874 ,  H01L21/67109 ,  H01L21/67248

Abstract: A handler includes a first cooling channel and a second cooling channel corresponding to housing pockets, a first supply channel, a second supply channel branched from the first supply channel, a first throttle valve which controls the flow of refrigerant such that the flow amount of the refrigerant flowing through the second cooling channel becomes larger than the flow amount of the refrigerant flowing through the first cooling channel, heaters which heat the respective housing pockets, temperature sensors which detect the temperatures of the respective housing pockets, and a control device which controls the opening and closing condition of a valve and the output of the heater, and controls the output of the other heater such that the detection values of the respective temperature sensors become a target temperature.

Abstract translation: 处理机包括第一冷却通道和对应于容纳腔的第二冷却通道，第一供应通道，从第一供应通道分支的第二供应通道，第一节流阀，其控制制冷剂的流动， 流过第二冷却通道的制冷剂变得大于流过第一冷却通道的制冷剂的流量，加热各个容纳腔的加热器，检测各个容纳腔的温度的温度传感器，以及控制装置 阀的打开和关闭状态以及加热器的输出，并且控制另一加热器的输出，使得各个温度传感器的检测值成为目标温度。

公开(公告)号：US20180080982A1

公开(公告)日：2018-03-22

申请号：US15561761

申请日：2016-02-25

Applicant: Seiko Epson Corporation

Inventor： Daisuke KIRIHARA ,  Masami MAEDA

IPC: G01R31/28

Abstract: An inspection device includes: one chamber in which an IC device after an inspection can be arranged; another chamber in which the IC device after the inspection can be arranged and which is different from the one chamber; and a tray on which the electronic component after the inspection can be placed and which can move with the IC device from the one chamber to the another chamber. Also, the inspection device can detect at least one of humidity and temperature in the another chamber.

公开(公告)号：US20180074119A1

公开(公告)日：2018-03-15

申请号：US15558771

申请日：2016-02-03

Applicant: Seiko Epson Corporation

Inventor： Daisuke KIRIHARA ,  Masami MAEDA ,  Toshioki SHIMOJIMA ,  Takashi YAMAZAKI

IPC: G01R31/28 ,  H01L21/673

CPC classification number: G01R31/2893 ,  G01R31/2891 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67288 ,  H01L21/67356 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67389

Abstract: An electronic component transport apparatus includes: an openable and closable first opening and closing portion; a first rotation support portion which supports the first opening and closing portion to be rotatable; a second opening and closing portion provided to be openable and closable in the first opening and closing portion; and a second rotation support portion which supports the second opening and closing portion to be rotatable. An area of the first opening and closing portion is greater than an area of the second opening and closing portion.

公开(公告)号：US20130209199A1

公开(公告)日：2013-08-15

申请号：US13765114

申请日：2013-02-12

Applicant: Seiko Epson Corporation

Inventor： Masami MAEDA ,  Toshioki SHIMOJIMA

IPC: B65G49/00

CPC classification number: B65G49/00 ,  G01R31/2893 ,  H01L21/67109 ,  H01L21/6838

Abstract: A handler includes a supply shuttle plate on which a device is placed and cooled, and a transfer robot configured to transfer the device placed on the supply shuttle plate from the supply shuttle plate. The transfer robot includes an adsorbing portion configured to adsorb the device placed on the supply shuttle plate thereon, a vertical movement arm configured to move the adsorbing portion away from the supply shuttle plate, an arm box configured to accommodate the adsorbing portion together with the device in a state of being kept away from the supply shuttle plate, and a dry air supply unit configured to supply dry gas into the arm box.

Abstract translation: 一个处理机包括一个放置和冷却设备的供应往复板，以及一个传送机器人，它被配置成从供应往复板转移放置在供应梭板上的装置。 传送机器人包括：吸附部，其被配置为吸附放置在供给梭板上的装置;垂直移动臂，被配置为使吸附部离开供给往复板;移动臂，其构造成将该吸附部与该装置一起容纳 处于远离供应往复板的状态，以及干燥空气供给单元，其构造成将干燥气体供给到手臂箱中。