- 专利标题: SEARCH APPARATUS AND SEARCH METHOD
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申请号: US15658844申请日: 2017-07-25
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公开(公告)号: US20180082873A1公开(公告)日: 2018-03-22
- 发明人: Takeshi OHMORI , Junichi TANAKA , Hikaru KOYAMA , Masaru KURIHARA
- 申请人: Hitachi, Ltd.
- 优先权: JP2016-184386 20160921
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; G06F17/30 ; G06N5/04 ; G01D1/00
摘要:
A search apparatus receives an input target value, which indicates a condition to be set in a semiconductor processing apparatus or a result obtained by processing the semiconductor using the processing apparatus, a reference value of the condition inside a search area, and the result, wherein the reference value is indicated by the target value. A prediction model indicating a relation between the condition and the result based on a setting value of the condition inside the search area is generated and, a measured value of the result is obtained. A prediction value is acquired by assigning the target value to the prediction model. The prediction value is set to the reference value when it is determined that the prediction value is closer to the target value, and a prediction value satisfying an achievement condition is set when the prediction value satisfies the achievement condition of the target value.
公开/授权文献
- US10734261B2 Search apparatus and search method 公开/授权日:2020-08-04
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