Invention Application
- Patent Title: TEMPORARY MECHANICAL STABILIZATION OF SEMICONDUCTOR CAVITIES
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Application No.: US15704537Application Date: 2017-09-14
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Publication No.: US20180086632A1Publication Date: 2018-03-29
- Inventor: Dominic Maier , Joachim Mahler , Daniel Porwol , Alfred Sigl
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Priority: DE102016117990.6 20160923
- Main IPC: B81C1/00
- IPC: B81C1/00

Abstract:
A method for fabricating an electronic device is disclosed. In one example, the method comprises providing a semiconductor wafer, forming a plurality of cavities into the semiconductor wafer, filling a stabilization material into the cavities, fabricating a temporary panel by applying a cap sheet onto the semiconductor wafer, the cap sheet covering the cavities, singulating the temporary panel into a plurality of semiconductor devices, fabricating an embedded wafer by embedding the semiconductor devices in an encapsulant, removing the cap sheet of each one of the semiconductor devices, and singulating the embedded wafer into a plurality of electronic devices.
Public/Granted literature
- US09988262B2 Temporary mechanical stabilization of semiconductor cavities Public/Granted day:2018-06-05
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