- 专利标题: MICRO-TRANSFER PRINTING WITH VOLATILE ADHESIVE LAYER
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申请号: US15718636申请日: 2017-09-28
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公开(公告)号: US20180096964A1公开(公告)日: 2018-04-05
- 发明人: Salvatore Bonafede , Matthew Meitl , Ronald S. Cok
- 申请人: X-Celeprint Limited
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/67 ; H01L21/683 ; H01L33/62 ; H01L33/00
摘要:
A method of making a micro-transfer printed structure includes providing a destination substrate and a source substrate having one or more micro-transfer printable components. A layer of volatile adhesive is formed over the destination substrate and one or more components are micro-transfer printed from the source substrate onto the volatile adhesive layer at a non-evaporable temperature of the volatile adhesive layer. The volatile adhesive layer is then heated to an evaporation temperature to evaporate at least a portion of the volatile adhesive after micro-transfer printing. In certain embodiments, a micro-transfer printed structure includes a destination substrate having one or more metal contacts and one or more micro-transfer printable components having one or more component contacts disposed on the destination substrate with the metal contact aligned with the component contact. The metal contact can form an intermetallic bond with the component contact.
公开/授权文献
- US10157880B2 Micro-transfer printing with volatile adhesive layer 公开/授权日:2018-12-18
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