- 专利标题： METHOD OF PRODUCING ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE BY USING VAPOR DEPOSITION DEVICE
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申请号： US15848635申请日： 2017-12-20
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公开(公告)号： US20180114953A1公开(公告)日： 2018-04-26
- 发明人: Tohru SONODA , Shinichi KAWATO , Satoshi INOUE , Satoshi HASHIMOTO
- 申请人： Sharp Kabushiki Kaisha
- 申请人地址： JP Sakai City
- 专利权人： Sharp Kabushiki Kaisha
- 当前专利权人： Sharp Kabushiki Kaisha
- 当前专利权人地址： JP Sakai City
- 优先权： JP2011-057258 20110315
- 主分类号： H01L51/56
- IPC分类号： H01L51/56 ; C23C14/56 ; C23C14/54
摘要：
A vapor deposition particle injection device of the present invention includes: vapor deposition particle generating sections and for generating vapor deposition particles in the form of vapor by heating vapor deposition materials and; and a nozzle section which is connected to the vapor deposition particle generating sections and has an injection hole from which the vapor deposition particles generated by the vapor deposition particle generating sections and are injected outward. The vapor deposition particle generating section has a smaller capacity for the vapor deposition material than the vapor deposition particle generating section.
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