VAPOR DEPOSITION APPARATUS AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENT ELEMENT
    8.
    发明申请
    VAPOR DEPOSITION APPARATUS AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENT ELEMENT 有权
    蒸气沉积装置及其生产有机电致发光元件的方法

    公开(公告)号:US20160194747A1

    公开(公告)日:2016-07-07

    申请号:US14910642

    申请日:2014-07-25

    Abstract: The present invention provides a vapor deposition apparatus capable of preventing abnormal film formation due to scattering in vapor deposition streams; and a method for producing an organic electroluminescent element which includes forming a patterned thin film with the vapor deposition apparatus. The present invention relates to a vapor deposition apparatus that includes a vapor deposition source equipped with a nozzle that ejects vapor deposition particles; an integrated limiting plate equipped with a first limiting plate including an opening that is in front of the nozzle, and with second limiting plates placed in the opening in the first limiting plate; and a mask including slits. The present invention also relates to a method for producing electroluminescent elements that includes a vapor deposition step of forming a patterned thin film with the vapor deposition apparatus.

    Abstract translation: 本发明提供一种能够防止由于气相沉积物流中的散射引起的异常成膜的气相沉积装置; 以及制造有机电致发光元件的方法,其包括用蒸镀装置形成图案化薄膜。 蒸镀装置技术领域本发明涉及一种蒸镀装置,其特征在于,具备:喷射蒸镀粒子的喷嘴的蒸镀源, 集成限位板,其配备有包括位于喷嘴前面的开口的第一限位板,以及放置在第一限位板中的开口中的第二限位板; 以及包括狭缝的面罩。 本发明还涉及一种用于制造电致发光元件的方法,其包括用气相沉积装置形成图案化薄膜的气相沉积步骤。

Patent Agency Ranking