- 专利标题: CONTACT-VIA CHAIN AS CORROSION DETECTOR
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申请号: US15573252申请日: 2016-05-09
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公开(公告)号: US20180138098A1公开(公告)日: 2018-05-17
- 发明人: Daniel Schneider , Franz Dietz
- 申请人: Robert Bosch GmbH
- 优先权: DE102015107328.5 20150511
- 国际申请: PCT/EP2016/060286 WO 20160509
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; H01L23/522 ; H01L23/58 ; H01L23/528 ; H01L23/00 ; G01R31/26
摘要:
A detector for determining a faulty semiconductor component including a semiconductor component, a contact-via chain, which is situated laterally at a distance from the semiconductor component and which surrounds the semiconductor component in regions, a guard ring, which is situated laterally at a distance from the semiconductor component, and an evaluation unit, which is situated on the semiconductor component, wherein the evaluation unit is designed to apply an electrical voltage to the contact-via chain, in particular a permanent electrical voltage, to detect a resistance value of the contact-via chain and to produce an output signal when the resistance value of the contact-via chain exceeds a threshold value.
公开/授权文献
- US10431507B2 Contact-via chain as corrosion detector 公开/授权日:2019-10-01
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