发明申请
- 专利标题: MEMS DEVICE
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申请号: US15826255申请日: 2017-11-29
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公开(公告)号: US20180152792A1公开(公告)日: 2018-05-31
- 发明人: Tsjerk Hans HOEKSTRA , Axel THOMSEN , Colin Robert JENKINS , Aleksey Sergeyevich KHENKIN
- 申请人: Cirrus Logic International Semiconductor Ltd.
- 申请人地址: GB Edinburgh
- 专利权人: Cirrus Logic International Semiconductor Ltd.
- 当前专利权人: Cirrus Logic International Semiconductor Ltd.
- 当前专利权人地址: GB Edinburgh
- 优先权: GB1700804.6 20170117
- 主分类号: H04R9/08
- IPC分类号: H04R9/08 ; H04R29/00 ; B81B3/00
摘要:
A MEMS transducer comprising: a flexible membrane, the flexible membrane comprising a first membrane electrode; a back plate, the back plate comprising a first back plate electrode; wherein the back plate is supported in a spaced relation with respect to the flexible membrane. The MEMS transducer is configured to provide electrical connections to the first membrane electrode and the first back plate electrode. The flexible membrane further comprises a second membrane electrode, the second membrane electrode being electrically isolated from the first membrane electrode, wherein the first membrane electrode and the second membrane electrode are arranged to reduce variation in electrostatic forces across the flexible membrane.