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    MEMS DEVICE AND PROCESS
    2.
    发明申请
    MEMS DEVICE AND PROCESS 审中-公开

    公开(公告)号：US20180035190A1

    公开(公告)日：2018-02-01

    申请号：US15730123

    申请日：2017-10-11

    申请人： Cirrus Logic International Semiconductor Ltd.

    发明人： Tsjerk HOEKSTRA ,  Colin Robert JENKINS

    IPC分类号： H04R1/08 ,  B81B3/00 ,  H04R19/00 ,  B81C1/00

    CPC分类号： H04R1/08 ,  B81B3/0021 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R19/005 ,  H04R2201/003

    摘要： This application relates to MEMS devices, especially MEMS capacitive transducers and to processes for forming such MEMS transducer that provide increased robustness and resilience to acoustic shock. The application describes a MEMS transducer (400) having at least one membrane layer (101) supported so as to define a flexible membrane. A strengthening layer (401; 701) is mechanically coupled to the membrane layer and is disposed around the majority of a peripheral area of the flexible membrane but does not extend over the whole flexible membrane. The strengthening layer, which in some embodiments may be formed from the same material as the membrane electrode (102) being disposed in the peripheral area helps reduce stress in membrane at locations that otherwise may be highly stressed in acoustic shock situations. The membrane may be supported over a substrate cavity and the strengthening layer may be provided in an area of the membrane that could make contact with the edge (202) of the substrate cavity.

    MEMS DEVICE AND PROCESS
    4.
    发明申请
    MEMS DEVICE AND PROCESS 审中-公开

    公开(公告)号：US20180044167A1

    公开(公告)日：2018-02-15

    申请号：US15792197

    申请日：2017-10-24

    申请人： Cirrus Logic International Semiconductor Ltd.

    发明人： Colin Robert JENKINS ,  Tsjerk HOEKSTRA ,  Scott CARGILL

    IPC分类号： B81B3/00 ,  H04R19/00 ,  B81B7/00 ,  H04R19/04 ,  H04R7/10

    CPC分类号： B81B3/0072 ,  B81B7/0061 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/04 ,  H04R7/10 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

    摘要： The application describes improvements to (MEMS) transducers (100) having a flexible membrane (301) with a membrane electrode (302), especially where the membrane is crystalline or polycrystalline and the membrane electrode is metal or a metal alloy. Such transducers may typically include a back-plate having at least one back-plate layer (304) coupled to a back-plate electrode (303), with a plurality of holes (314) in the back-plate electrode corresponding to a plurality back-plate holes (312) through the back-plate. In embodiments of the invention the membrane electrode has at least one opening (313) in the membrane electrode wherein, at least part of the area of the opening corresponds to the area of at least one back-plate hole, in a direction normal to the membrane, and there is no hole in the flexible membrane at said opening in the membrane electrode. There may be a plurality of such openings. The openings effectively allow a reduction in the amount of membrane electrode material, e.g. metal, that may undergo plastic deformation and permanently deform the membrane. The openings are at least partly aligned with the back-plate holes to minimise any loss of capacitance.

    MEMS DEVICES AND PROCESSES
    10.
    发明申请
    MEMS DEVICES AND PROCESSES 审中-公开

    公开(公告)号：US20190100429A1

    公开(公告)日：2019-04-04

    申请号：US16140585

    申请日：2018-09-25

    申请人： Cirrus Logic International Semiconductor Ltd.

    发明人： Tom HANLEY ,  Colin Robert JENKINS ,  Euan James BOYD

    IPC分类号： B81B7/02 ,  H04R19/04 ,  B81C1/00

    摘要： A MEMS transducer and method of forming a MEMS transducer. The MEMS transducer comprises a flexible membrane and a backplate, a membrane electrode being located on a polygon shaped first surface of the flexible membrane, and a backplate electrode being located on a first surface of the backplate facing the membrane electrode. At least one of the membrane electrode and the backplate electrode has an outline shape configured to correspond to a contour of a contour map, the contour map representing relative amounts of displacement of portions of the flexible membrane from an equilibrium position in response to pressure differences generated by incident sound waves.