Redundant Optical Radiant Energy Source and Redundant Optical Device, Especially for Metrology Applications
摘要:
A redundant optical radiant energy source, especially for metrology applications, including a redundant optical device for creating optical radiation including at least two semiconductor lasers, which are provided on a thermally conducting laser support, at least one thermal sensor configured to detect the temperature of the laser support or at least one of the semiconductor lasers, respectively; and a heating/cooling device thermally connected to or integrally provided with the laser support.
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