- 专利标题: METHOD FOR PRODUCING GROUP 13 NITRIDE SINGLE CRYSTAL AND APPARATUS FOR PRODUCING GROUP 13 NITRIDE SINGLE CRYSTAL
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申请号: US15891764申请日: 2018-02-08
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公开(公告)号: US20180163323A1公开(公告)日: 2018-06-14
- 发明人: Takashi Satoh , Naoya Miyoshi , Junichi Wada , Masahiro Hayashi , Seiji Sarayama , Haruo Sunakawa , Yujirou Ishihara , Akira Usui
- 申请人: Takashi Satoh , Naoya Miyoshi , Junichi Wada , Masahiro Hayashi , Seiji Sarayama , Haruo Sunakawa , Yujirou Ishihara , Akira Usui
- 优先权: JP2015-158489 20150810
- 主分类号: C30B29/40
- IPC分类号: C30B29/40 ; C30B19/04 ; C30B19/06 ; C30B19/10 ; C30B17/00 ; C30B35/00
摘要:
A method for producing a group 13 nitride single crystal includes dissolving and crystal growing. The dissolving includes dissolving nitrogen in a mixed melt in a reaction vessel that contains the mixed melt, a seed crystal, and a surrounding member. The mixed melt contains an alkali metal and a group 13 metal. The seed crystal is a seed crystal that is placed in the mixed melt and includes a group 13 nitride crystal in which a principal face is a c-plane. The surrounding member is arranged so as to surround the entire area of a side face of the seed crystal. The crystal growing includes growing a group 13 nitride crystal on the seed crystal.
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