- 专利标题: SEMICONDUCTOR OPTICAL MODULATION ELEMENT
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申请号: US15577918申请日: 2016-06-01
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公开(公告)号: US20180164654A1公开(公告)日: 2018-06-14
- 发明人: Yoshihiro Ogiso , Josuke Ozaki , Norihide Kashio , Nobuhiro Kikuchi , Masaki Kohtoku
- 申请人: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- 优先权: JP2015-112448 20150602
- 国际申请: PCT/JP2016/002649 WO 20160601
- 主分类号: G02F1/225
- IPC分类号: G02F1/225
摘要:
To provide a Mach-Zehnder (MZ) type semiconductor optical modulation element that can be used as a modulator, which is ultrafast and excellent in electrical stability. A semiconductor optical modulation element of a Mach-Zehnder type that performs modulation of light using a refractive index modulation region where a refractive index of the light guided to an optical waveguide is modulated and an input and output region where multiplexing/demultiplexing of the light split in the refractive index modulation region is performed, characterized in that in the refractive index modulation region of the optical waveguide, an n-type clad layer, an i core layer, and a p-type clad layer are stacked in the order from a top layer on a substrate surface equivalent to a (100) plane of a sphalerite-type semi-insulating semiconductor crystal substrate, the n-type clad layer is formed in a ridge shape in an inverted mesa direction, and a capacitance-loaded electrode is provided on the n-type clad layer.
公开/授权文献
- US10254624B2 Semiconductor optical modulation element 公开/授权日:2019-04-09
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