Invention Application
- Patent Title: SEMICONDUCTOR DEVICE, MICROPHONE AND METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE
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Application No.: US15813990Application Date: 2017-11-15
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Publication No.: US20180170745A1Publication Date: 2018-06-21
- Inventor: Stefan Barzen , Wolfgang Friza , Marc Fueldner
- Applicant: Infineon Technologies AG
- Priority: DE102016125082.1 20161221
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; H04R9/08 ; H04R31/00

Abstract:
A semiconductor device is proposed. The semiconductor device comprises a membrane structure having an opening. Furthermore, the semiconductor device comprises a first backplate structure, which is arranged on a first side of the membrane structure, and a second backplate structure, which is arranged on a second side of the membrane structure. The semiconductor device furthermore comprises a vertical connection structure, which connects the first backplate structure to the second backplate structure. In this case, the vertical connection structure extends through the opening.
Public/Granted literature
- US10464807B2 Semiconductor device, microphone and method for producing a semiconductor device Public/Granted day:2019-11-05
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