- 专利标题: Apparatus and Methods for Photonic Integrated Resonant Accelerometers
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申请号: US15895553申请日: 2018-02-13
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公开(公告)号: US20180172723A1公开(公告)日: 2018-06-21
- 发明人: Suraj Deepak BRAMHAVAR , Paul William JUODAWLKIS
- 申请人: Massachusetts Institute of Technology
- 主分类号: G01P15/097
- IPC分类号: G01P15/097 ; G01P15/093
摘要:
The accelerometers disclosed herein provide excellent sensitivity, long-term stability, and low SWaP-C through a combination of photonic integrated circuit technology with standard micro-electromechanical systems (MEMS) technology. Examples of these accelerometers use optical transduction to improve the scale factor of traditional MEMS resonant accelerometers by accurately measuring the resonant frequencies of very small (e.g., about 1 μm) tethers attached to a large (e.g., about 1 mm) proof mass. Some examples use ring resonators to measure the tether frequencies and some other examples use linear resonators to measure the tether frequencies. Potential commercial applications span a wide range from seismic measurement systems to automotive stability controls to inertial guidance to any other application where chip-scale accelerometers are currently deployed.
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