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1.发明公开公开(公告)号：US20230400652A1
公开(公告)日：2023-12-14
申请号：US18317597
申请日：2023-05-15
发明人： Christopher Heidelberger , Cheryl Marie SORACE-AGASKAR , Jason PLANT , Boris KHARAS , Reuel B. SWINT , Yifei Li , Paul William JUODAWLKIS
CPC分类号： G02B6/43 , G02B6/4283 , G02B6/4295
摘要： A III-V/SiNx hybrid integrated photonics platform is described. A wafer can include regions where SiNx waveguides are formed and regions where III-V waveguides have been grown heteroepitaxially from the Si substrate and formed lithographically to butt couple to the SiNx waveguides. Efficient optical coupling is possible between the SiNx and III-V waveguides (−2.5 dB loss/transition). A threading dislocation density (TDD) as low as 4×106 cm−2 can be obtained in the III-V waveguides. The TDD enables fully parallel fabrication of integrated III-V optoelectronic devices, allowing for complex photonic integrated circuits with many active components.
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公开(公告)号：US20200333683A1
公开(公告)日：2020-10-22
申请号：US16842048
申请日：2020-04-07
发明人： Scott A. SKIRLO , Cheryl Marie SORACE-AGASKAR , Marin SOLJACIC , Simon VERGHESE , Jeffrey S. HERD , Paul William JUODAWLKIS , Yi YANG , DIRK ENGLUND , Mihika PRABHU
摘要： An integrated optical beam steering device includes a planar dielectric lens that collimates beams from different inputs in different directions within the lens plane. It also includes an output coupler, such as a grating or photonic crystal, that guides the collimated beams in different directions out of the lens plane. A switch matrix controls which input port is illuminated and hence the in-plane propagation direction of the collimated beam. And a tunable light source changes the wavelength to control the angle at which the collimated beam leaves the plane of the substrate. The device is very efficient, in part because the input port (and thus in-plane propagation direction) can be changed by actuating only log2 N of the N switches in the switch matrix. It can also be much simpler, smaller, and cheaper because it needs fewer control lines than a conventional optical phased array with the same resolution.
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公开(公告)号：US20200096537A1
公开(公告)日：2020-03-26
申请号：US16677842
申请日：2019-11-08
IPC分类号： G01P15/097 , G01P15/093
摘要： The accelerometers disclosed herein provide excellent sensitivity, long-term stability, and low SWaP-C through a combination of photonic integrated circuit technology with standard micro-electromechanical systems (MEMS) technology. Examples of these accelerometers use optical transduction to improve the scale factor of traditional MEMS resonant accelerometers by accurately measuring the resonant frequencies of very small (e.g., about 1 μm) tethers attached to a large (e.g., about 1 mm) proof mass. Some examples use ring resonators to measure the tether frequencies and some other examples use linear resonators to measure the tether frequencies. Potential commercial applications span a wide range from seismic measurement systems to automotive stability controls to inertial guidance to any other application where chip-scale accelerometers are currently deployed.
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公开(公告)号：US20190265574A1
公开(公告)日：2019-08-29
申请号：US16284161
申请日：2019-02-25
发明人： Scott A. SKIRLO , Cheryl Marie SORACE-AGASKAR , Marin SOLJACIC , Simon VERGHESE , Jeffrey S. HERD , Paul William JUODAWLKIS , Yi YANG , Dirk Robert ENGLUND , Mihika PRABHU
摘要： An integrated optical beam steering device includes a planar dielectric lens that collimates beams from different inputs in different directions within the lens plane. It also includes an output coupler, such as a grating or photonic crystal, that guides the collimated beams in different directions out of the lens plane. A switch matrix controls which input port is illuminated and hence the in-plane propagation direction of the collimated beam. And a tunable light source changes the wavelength to control the angle at which the collimated beam leaves the plane of the substrate. The device is very efficient, in part because the input port (and thus in-plane propagation direction) can be changed by actuating only log2 N of the N switches in the switch matrix. It can also be much simpler, smaller, and cheaper because it needs fewer control lines than a conventional optical phased array with the same resolution.
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公开(公告)号：US20180172723A1
公开(公告)日：2018-06-21
申请号：US15895553
申请日：2018-02-13
IPC分类号： G01P15/097 , G01P15/093
CPC分类号： G01P15/097 , G01P15/093
摘要： The accelerometers disclosed herein provide excellent sensitivity, long-term stability, and low SWaP-C through a combination of photonic integrated circuit technology with standard micro-electromechanical systems (MEMS) technology. Examples of these accelerometers use optical transduction to improve the scale factor of traditional MEMS resonant accelerometers by accurately measuring the resonant frequencies of very small (e.g., about 1 μm) tethers attached to a large (e.g., about 1 mm) proof mass. Some examples use ring resonators to measure the tether frequencies and some other examples use linear resonators to measure the tether frequencies. Potential commercial applications span a wide range from seismic measurement systems to automotive stability controls to inertial guidance to any other application where chip-scale accelerometers are currently deployed.
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