- 专利标题: BUMPED ELECTRODE ARRAYS FOR MICROASSEMBLERS
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申请号: US15391140申请日: 2016-12-27
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公开(公告)号: US20180182650A1公开(公告)日: 2018-06-28
- 发明人: Julie A. Bert , David K. Biegelsen , Sourobh Raychaudhuri
- 申请人: Palo Alto Research Center Incorporated
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/68 ; H01L21/683
摘要:
An apparatus including a bumped electrode array and a method of fabricating a bumped electrode array is disclosed. The method includes providing a substrate for the electrode array. The method also includes disposing a plurality of non-planar structures including electrodes above the substrate of the electrode array. The method further includes disposing a dielectric layer above the plurality of non-planar structures having a defined radius of curvature.
公开/授权文献
- US10043687B2 Bumped electrode arrays for microassemblers 公开/授权日:2018-08-07
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