- 专利标题: ANATASE-TYPE NIOBIUM OXYNITRIDE, METHOD FOR PRODUCING SAME, AND SEMICONDUCTOR STRUCTURE
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申请号: US15745954申请日: 2016-07-21
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公开(公告)号: US20180209065A1公开(公告)日: 2018-07-26
- 发明人: Ryosuke KIKUCHI , Toru NAKAMURA , Kazuhito HATO , Tetsuya HASEGAWA , Yasushi HIROSE
- 申请人: Panasonic Corporation
- 优先权: JP2015-145702 20150723
- 国际申请: PCT/JP2016/003411 WO 20160721
- 主分类号: C30B29/38
- IPC分类号: C30B29/38 ; C01B21/082 ; C30B25/06 ; H01L31/032 ; H01L31/036 ; H01L31/18 ; H01L21/02
摘要:
The present disclosure provides an anatase-type niobium oxynitride having an anatase-type crystal structure and represented by the chemical formula NbON. The present disclosure also provides a semiconductor structure (100) including: a substrate (110) having at least one principal surface composed of a perovskite-type compound having a perovskite-type crystal structure; and a niobium oxynitride (for example, an anatase-type niobium oxynitride film (120)) grown on the one principal surface of the substrate (110), the niobium oxynitride having an anatase-type crystal structure and being represented by the chemical formula NbON.
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