- 专利标题: TREATMENT LIQUID AND PATTERN FORMING METHOD
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申请号: US15937876申请日: 2018-03-28
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公开(公告)号: US20180217503A1公开(公告)日: 2018-08-02
- 发明人: Hideaki TSUBAKI , Toru TSUCHIHASHI , Wataru NIHASHI , Kei YAMAMOTO
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2015-195057 20150930
- 主分类号: G03F7/32
- IPC分类号: G03F7/32 ; G03F7/16 ; G03F7/20 ; G03F7/40 ; H01L21/304 ; G03F7/038 ; G03F7/039 ; G03F7/38
摘要:
An object of the present invention is to provide a treatment liquid for patterning a resist film and a pattern forming method, each of which can simultaneously suppress the occurrence of pattern collapse in a resist L/S pattern and the occurrence of omission failure in a resist C/H pattern.The treatment liquid of the present invention is a treatment liquid for patterning a resist film, which is used for subjecting a resist film obtained from an actinic ray-sensitive or radiation-sensitive resin composition to at least one of development or washing, and contains an organic solvent, in which the treatment liquid contains a first organic solvent having an SP value of 16.3 MPa1/2 or less and a second organic solvent having an SP value of 17.1 MPa1/2 or more.
公开/授权文献
- US10962884B2 Treatment liquid and pattern forming method 公开/授权日:2021-03-30
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