Invention Application
- Patent Title: COATING DEVICE AND COATING METHOD
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Application No.: US15881904Application Date: 2018-01-29
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Publication No.: US20180219188A1Publication Date: 2018-08-02
- Inventor: Yousuke Mine , Kazuhito Miyazaki
- Applicant: Tokyo Electron Limited
- Priority: JP2017-017053 20170201
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L51/00 ; H01L21/66 ; B41J2/195 ; B41J2/17

Abstract:
Disclosed is a coating device which draws a pattern of a functional liquid on a substrate. The coating device includes: a substrate holding unit which holds the substrate; a droplet discharging unit which discharges a droplet of the functional liquid on the substrate held by the substrate holding unit; a moving unit which relatively moves the substrate holding unit and the droplet discharging unit in a main scanning direction and a sub scanning direction on a base; a mass measuring unit including a cup which receives the droplet discharged by the droplet discharging unit and a mass measuring device which measures a mass of the functional liquid accumulated in the cup; and a liquid drain unit which drains the functional liquid accumulated in the cup.
Public/Granted literature
Information query
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