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公开(公告)号：US20180233707A1
公开(公告)日：2018-08-16
申请号：US15889276
申请日：2018-02-06
Applicant: Tokyo Electron Limited
Inventor： Yousuke Mine , Kazuhito Miyazaki
CPC classification number: H01L51/56 , B05C5/0291 , B05C13/02 , B41J2/01 , H01L27/3211 , H01L27/3244 , H01L51/0005 , H01L51/0029 , H01L51/0096
Abstract: Provided is a coating apparatus including: a stage unit which floats the substrate to a predetermined height by using wind pressure of gas; a droplet discharge unit which drops the droplet of the functional liquid on the substrate floated to the predetermined height from the stage unit; a main scanning direction moving unit which moves the substrate, which is floated to the predetermined height from the stage unit, in the main scanning direction while holding the substrate; and a sub-scanning direction moving unit which moves the droplet discharge unit in the sub-scanning direction with respect to the substrate floated to the predetermined height from the stage unit. The sub-scanning direction moving unit moves the droplet discharge unit in the sub-scanning direction while the main scanning direction moving unit repeatedly moves the substrate in the main scanning direction and the droplet discharge unit repeatedly drops the droplet.
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Patent Agency Ranking
公开(公告)号：US10850507B2
公开(公告)日：2020-12-01
申请号：US15881904
申请日：2018-01-29
Applicant: Tokyo Electron Limited
Inventor： Yousuke Mine , Kazuhito Miyazaki
IPC: B41J2/045 , B05C11/10 , B05D1/34 , H01L51/56 , H01L21/66 , B41J2/17 , B41J3/28 , B41J3/407 , B05B15/50 , H01L51/00 , H01L51/50 , H05B33/10 , G01G11/08
Abstract: Disclosed is a coating device which draws a pattern of a functional liquid on a substrate. The coating device includes: a substrate holding unit which holds the substrate; a droplet discharging unit which discharges a droplet of the functional liquid on the substrate held by the substrate holding unit; a moving unit which relatively moves the substrate holding unit and the droplet discharging unit in a main scanning direction and a sub scanning direction on a base; a mass measuring unit including a cup which receives the droplet discharged by the droplet discharging unit and a mass measuring device which measures a mass of the functional liquid accumulated in the cup; and a liquid drain unit which drains the functional liquid accumulated in the cup.
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公开(公告)号：US10991608B2
公开(公告)日：2021-04-27
申请号：US15889276
申请日：2018-02-06
Applicant: Tokyo Electron Limited
Inventor： Yousuke Mine , Kazuhito Miyazaki
IPC: H01L21/677 , B05C13/02 , B65G47/24 , F16C29/00 , H01L21/67 , B25B11/00 , G03F7/20 , H01L51/56 , B05C5/02 , H01L51/00 , B41J2/01 , H01L27/32
Abstract: Provided is a coating apparatus including: a stage unit which floats the substrate to a predetermined height by using wind pressure of gas; a droplet discharge unit which drops the droplet of the functional liquid on the substrate floated to the predetermined height from the stage unit; a main scanning direction moving unit which moves the substrate, which is floated to the predetermined height from the stage unit, in the main scanning direction while holding the substrate; and a sub-scanning direction moving unit which moves the droplet discharge unit in the sub-scanning direction with respect to the substrate floated to the predetermined height from the stage unit. The sub-scanning direction moving unit moves the droplet discharge unit in the sub-scanning direction while the main scanning direction moving unit repeatedly moves the substrate in the main scanning direction and the droplet discharge unit repeatedly drops the droplet.
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公开(公告)号：US20180219188A1
公开(公告)日：2018-08-02
申请号：US15881904
申请日：2018-01-29
Applicant: Tokyo Electron Limited
Inventor： Yousuke Mine , Kazuhito Miyazaki
CPC classification number: H01L51/56 , B05B15/50 , B41J2/14016 , B41J2/14201 , B41J2/1721 , B41J2/195 , B41J3/28 , B41J3/407 , B41J2002/1742 , H01L22/20 , H01L51/0005 , H01L51/5012 , H01L51/5056 , H01L51/5072 , H01L51/5088 , H01L51/5092 , H05B33/10
Abstract: Disclosed is a coating device which draws a pattern of a functional liquid on a substrate. The coating device includes: a substrate holding unit which holds the substrate; a droplet discharging unit which discharges a droplet of the functional liquid on the substrate held by the substrate holding unit; a moving unit which relatively moves the substrate holding unit and the droplet discharging unit in a main scanning direction and a sub scanning direction on a base; a mass measuring unit including a cup which receives the droplet discharged by the droplet discharging unit and a mass measuring device which measures a mass of the functional liquid accumulated in the cup; and a liquid drain unit which drains the functional liquid accumulated in the cup.
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公开(公告)号：US20220111667A1
公开(公告)日：2022-04-14
申请号：US17645124
申请日：2021-12-20
Applicant: Tokyo Electron Limited
Inventor： Yousuke Mine
IPC: B41J13/00 , B41J29/393
Abstract: A liquid droplet discharging apparatus includes a transfer device, a discharging head, a first medium supply, a second medium supply and an imaging device. The transfer device is configured to transfer a work along a transfer direction. The discharging head is configured to discharge a liquid droplet of a functional liquid to the work. The first medium supply is configured to supply a first inspection medium, which receives the liquid droplet, in a direction orthogonal to the transfer direction. The second medium supply is configured to supply a second inspection medium, which receives the liquid droplet and is arranged side by side with respect to the first inspection medium in the transfer direction, in the direction orthogonal to the transfer direction. The imaging device is configured to image the liquid droplet discharged to the first inspection medium and the liquid droplet discharged to the second inspection medium.
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公开(公告)号：US11235599B2
公开(公告)日：2022-02-01
申请号：US16912920
申请日：2020-06-26
Applicant: Tokyo Electron Limited
Inventor： Yousuke Mine
IPC: B41J29/393 , B41J13/00
Abstract: A liquid droplet discharging apparatus includes a transfer device, a discharging head, a first medium supply, a second medium supply and an imaging device. The transfer device is configured to transfer a work along a transfer direction. The discharging head is configured to discharge a liquid droplet of a functional liquid to the work. The first medium supply is configured to supply a first inspection medium, which receives the liquid droplet, in a direction orthogonal to the transfer direction. The second medium supply is configured to supply a second inspection medium, which receives the liquid droplet and is arranged side by side with respect to the first inspection medium in the transfer direction, in the direction orthogonal to the transfer direction. The imaging device is configured to image the liquid droplet discharged to the first inspection medium and the liquid droplet discharged to the second inspection medium.
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