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公开(公告)号：US09836844B2
公开(公告)日：2017-12-05
申请号：US14663814
申请日：2015-03-20
发明人： Kazuhito Miyazaki , Akira Kakino
IPC分类号： G01B11/16 , G06T7/00 , G01B11/06 , G05B19/402 , G06T7/73
CPC分类号： G06T7/73 , G01B11/0616 , G05B19/402 , G05B2219/37572 , G05B2219/45013 , G06T2207/30164
摘要： Disclosed is a coating apparatus. A first imaging unit captures an image of the substrate disposed on the stage. A second imaging unit captures an image of the substrate disposed on the stage with a narrower viewing angle and higher resolution than the first imaging unit. The control unit performs a pre-alignment processing of capturing an image of a circular pre-alignment mark formed on the substrate using the first imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image and, after the pre-alignment processing, performs a fine-alignment processing of capturing an image of a circular fine-alignment mark formed on the substrate using the second imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image.
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公开(公告)号：US20150281654A1
公开(公告)日：2015-10-01
申请号：US14663814
申请日：2015-03-20
发明人： Kazuhito Miyazaki , Akira Kakino
CPC分类号： G06T7/73 , G01B11/0616 , G05B19/402 , G05B2219/37572 , G05B2219/45013 , G06T2207/30164
摘要： Disclosed is a coating apparatus. A first imaging unit captures an image of the substrate disposed on the stage. A second imaging unit captures an image of the substrate disposed on the stage with a narrower viewing angle and higher resolution than the first imaging unit. The control unit performs a pre-alignment processing of capturing an image of a circular pre-alignment mark formed on the substrate using the first imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image and, after the pre-alignment processing, performs a fine-alignment processing of capturing an image of a circular fine-alignment mark formed on the substrate using the second imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image.
摘要翻译： 公开了一种涂布装置。 第一成像单元捕获设置在台上的基板的图像。 第二成像单元以比第一成像单元更窄的视角和更高的分辨率捕获设置在平台上的基板的图像。 控制单元使用第一成像单元执行拍摄形成在基板上的圆形预对准标记的图像的预对准处理，并且通过基于捕获图像控制移动机构和旋转机构来执行基板的定位，以及 在预对准处理之后，使用第二成像单元进行拍摄形成在基板上的圆形微细对准标记的图像的精细对准处理，并且通过基于移动机构和旋转机构的控制来进行基板的定位 在捕获的图像上。
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公开(公告)号：US20180257099A1
公开(公告)日：2018-09-13
申请号：US15905977
申请日：2018-02-27
CPC分类号： B05C5/0208 , B05C11/00 , B05C13/00 , B05D1/26 , H01L21/6715 , H01L21/67259 , H01L21/681
摘要： A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.
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公开(公告)号：US20180233707A1
公开(公告)日：2018-08-16
申请号：US15889276
申请日：2018-02-06
发明人： Yousuke Mine , Kazuhito Miyazaki
CPC分类号： H01L51/56 , B05C5/0291 , B05C13/02 , B41J2/01 , H01L27/3211 , H01L27/3244 , H01L51/0005 , H01L51/0029 , H01L51/0096
摘要： Provided is a coating apparatus including: a stage unit which floats the substrate to a predetermined height by using wind pressure of gas; a droplet discharge unit which drops the droplet of the functional liquid on the substrate floated to the predetermined height from the stage unit; a main scanning direction moving unit which moves the substrate, which is floated to the predetermined height from the stage unit, in the main scanning direction while holding the substrate; and a sub-scanning direction moving unit which moves the droplet discharge unit in the sub-scanning direction with respect to the substrate floated to the predetermined height from the stage unit. The sub-scanning direction moving unit moves the droplet discharge unit in the sub-scanning direction while the main scanning direction moving unit repeatedly moves the substrate in the main scanning direction and the droplet discharge unit repeatedly drops the droplet.
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公开(公告)号：US11623237B2
公开(公告)日：2023-04-11
申请号：US15911375
申请日：2018-03-05
IPC分类号： B05C11/00 , B05D1/26 , B41J11/00 , B05C5/02 , G01B11/00 , B41J11/06 , B41J11/42 , H01L27/12 , B41J29/393 , H01L21/67 , B41J11/46 , B05C11/10 , B05B12/08 , B41J2/045 , G06T3/40 , B29C64/393 , B05C13/00 , H01J9/02 , H01L51/00 , B41J25/00 , B41J11/20
摘要： Disclosed is droplet ejecting apparatus that ejects droplets of a functional liquid onto a workpiece to draw a pattern. The droplet ejecting apparatus includes: a workpiece table; a droplet ejecting head configured to eject the droplets onto the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the droplet ejecting head in a main scanning direction and a sub-scanning direction; and a control unit configured to: detect a position of the workpiece or a position of the workpiece table while relatively moving the workpiece table and the droplet ejecting head along a plurality of scanning lines extending in the main scanning direction and set side by side in the sub-scanning direction; and create, based on a detection result, a correction table that indicates a correlation between a position of the movement mechanism and a positional correction amount of the workpiece table.
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公开(公告)号：US11571706B2
公开(公告)日：2023-02-07
申请号：US15905977
申请日：2018-02-27
IPC分类号： H01L21/67 , B41J2/045 , B41J25/00 , H01L51/00 , H01L21/68 , B41J29/393 , H04N1/00 , B05C5/02 , B05C13/00 , B05C11/10 , B05D1/26 , B05B12/08
摘要： A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.
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公开(公告)号：US10850507B2
公开(公告)日：2020-12-01
申请号：US15881904
申请日：2018-01-29
发明人： Yousuke Mine , Kazuhito Miyazaki
IPC分类号： B41J2/045 , B05C11/10 , B05D1/34 , H01L51/56 , H01L21/66 , B41J2/17 , B41J3/28 , B41J3/407 , B05B15/50 , H01L51/00 , H01L51/50 , H05B33/10 , G01G11/08
摘要： Disclosed is a coating device which draws a pattern of a functional liquid on a substrate. The coating device includes: a substrate holding unit which holds the substrate; a droplet discharging unit which discharges a droplet of the functional liquid on the substrate held by the substrate holding unit; a moving unit which relatively moves the substrate holding unit and the droplet discharging unit in a main scanning direction and a sub scanning direction on a base; a mass measuring unit including a cup which receives the droplet discharged by the droplet discharging unit and a mass measuring device which measures a mass of the functional liquid accumulated in the cup; and a liquid drain unit which drains the functional liquid accumulated in the cup.
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公开(公告)号：US11633969B2
公开(公告)日：2023-04-25
申请号：US15911539
申请日：2018-03-05
IPC分类号： B41J29/393 , H01L21/67 , B05C11/10 , B41J3/407 , H05B33/10 , B41J11/42 , B05B12/08 , H01L51/00 , B41J25/00 , B41J11/46 , B41J2/045 , B05C5/02 , B29C64/112
摘要： A control unit obtains a captured image of a reference workpiece by a second image capturing unit after a droplet ejected from a droplet ejecting head lands toward a reference mark formed on an upper surface of the reference workpiece, detects a positional deviation amount of a position of the reference mark and a landing position of the droplet based on the captured image, and calculates the correction amounts of the relative positions of a workpiece table and a droplet ejecting head based on the positional deviation amount.
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公开(公告)号：US10991608B2
公开(公告)日：2021-04-27
申请号：US15889276
申请日：2018-02-06
发明人： Yousuke Mine , Kazuhito Miyazaki
IPC分类号： H01L21/677 , B05C13/02 , B65G47/24 , F16C29/00 , H01L21/67 , B25B11/00 , G03F7/20 , H01L51/56 , B05C5/02 , H01L51/00 , B41J2/01 , H01L27/32
摘要： Provided is a coating apparatus including: a stage unit which floats the substrate to a predetermined height by using wind pressure of gas; a droplet discharge unit which drops the droplet of the functional liquid on the substrate floated to the predetermined height from the stage unit; a main scanning direction moving unit which moves the substrate, which is floated to the predetermined height from the stage unit, in the main scanning direction while holding the substrate; and a sub-scanning direction moving unit which moves the droplet discharge unit in the sub-scanning direction with respect to the substrate floated to the predetermined height from the stage unit. The sub-scanning direction moving unit moves the droplet discharge unit in the sub-scanning direction while the main scanning direction moving unit repeatedly moves the substrate in the main scanning direction and the droplet discharge unit repeatedly drops the droplet.
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公开(公告)号：US20180219188A1
公开(公告)日：2018-08-02
申请号：US15881904
申请日：2018-01-29
发明人： Yousuke Mine , Kazuhito Miyazaki
CPC分类号： H01L51/56 , B05B15/50 , B41J2/14016 , B41J2/14201 , B41J2/1721 , B41J2/195 , B41J3/28 , B41J3/407 , B41J2002/1742 , H01L22/20 , H01L51/0005 , H01L51/5012 , H01L51/5056 , H01L51/5072 , H01L51/5088 , H01L51/5092 , H05B33/10
摘要： Disclosed is a coating device which draws a pattern of a functional liquid on a substrate. The coating device includes: a substrate holding unit which holds the substrate; a droplet discharging unit which discharges a droplet of the functional liquid on the substrate held by the substrate holding unit; a moving unit which relatively moves the substrate holding unit and the droplet discharging unit in a main scanning direction and a sub scanning direction on a base; a mass measuring unit including a cup which receives the droplet discharged by the droplet discharging unit and a mass measuring device which measures a mass of the functional liquid accumulated in the cup; and a liquid drain unit which drains the functional liquid accumulated in the cup.
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