Invention Application
- Patent Title: EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
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Application No.: US15945672Application Date: 2018-04-04
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Publication No.: US20180224748A1Publication Date: 2018-08-09
- Inventor: Shinji NAGAI , Atsushi UEDA , Takashi SAITO
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00 ; H01J37/32 ; G21K1/06

Abstract:
An extreme ultraviolet light generating device may include a chamber, an EUV light focusing mirror provided therein, including a reflection surface having a concave curved shape and an outer peripheral portion around an outer edge of the reflection surface, and configured to focus EUV light radiated from plasma generated when a target is irradiated with laser light, a gas supplying device including peripheral heads provided on or along the outer peripheral portion; and a discharge device including a discharge path forming a discharge port near the outer peripheral portion, and configured to discharge an ion or a particle from the discharge port. The peripheral heads each may blow out a gas flow from the outer peripheral portion or a vicinity thereof along the reflection surface, and allow gas flows to join on the reflection surface to thereby form a gas flow along the reflection surface toward the discharge port.
Public/Granted literature
- US10268119B2 Extreme ultraviolet light generating device Public/Granted day:2019-04-23
Information query
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