SAMPLE HOLDER, MEMBER MOUNTING DEVICE, AND CHARGED PARTICLE BEAM APPARATUS
Abstract:
Disclosed herein is a sample holder, a member mounting device, and a charged particle beam apparatus, which are able to secure a compatible configuration for the transfer of a sample between different-type charged particle beam apparatuses while preventing an increase in equipment costs, individually or overall. The charged particle beam apparatus (10) includes a holder unit (13) for removably fastening a sample holder (12) for receiving a sample (S), and a sample stage unit (14) for loading the holder unit (13) in a sample chamber (11). The sample holder (12) includes a sample holding member for receiving a sample (S), a support section for supporting the sample holding member, and a clip disposed on the support section at a position where the sample holding member is disposed.
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