Invention Application
- Patent Title: SAMPLE HOLDER, MEMBER MOUNTING DEVICE, AND CHARGED PARTICLE BEAM APPARATUS
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Application No.: US15936155Application Date: 2018-03-26
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Publication No.: US20180277336A1Publication Date: 2018-09-27
- Inventor: Toshiyuki IWAHORI
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Priority: JP2017-060906 20170327
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26

Abstract:
Disclosed herein is a sample holder, a member mounting device, and a charged particle beam apparatus, which are able to secure a compatible configuration for the transfer of a sample between different-type charged particle beam apparatuses while preventing an increase in equipment costs, individually or overall. The charged particle beam apparatus (10) includes a holder unit (13) for removably fastening a sample holder (12) for receiving a sample (S), and a sample stage unit (14) for loading the holder unit (13) in a sample chamber (11). The sample holder (12) includes a sample holding member for receiving a sample (S), a support section for supporting the sample holding member, and a clip disposed on the support section at a position where the sample holding member is disposed.
Public/Granted literature
- US10529533B2 Sample holder, member mounting device, and charged particle beam apparatus Public/Granted day:2020-01-07
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