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    CHARGED PARTICLE BEAM APPARATUS
    1.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 审中-公开

    公开(公告)号：US20180277333A1

    公开(公告)日：2018-09-27

    申请号：US15936140

    申请日：2018-03-26

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Toshiyuki IWAHORI

    IPC: H01J37/08 ,  H01J37/20

    CPC classification number: H01J37/09 ,  H01J37/08 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/0213 ,  H01J2237/0458 ,  H01J2237/04756 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/28 ,  H01J2237/31749

    Abstract: Disclosed herein is a charged particle beam apparatus (10) including: a sample chamber (11); a sample stage (31); an electron beam column (13) irradiating a sample S using an electron beam; and a focused ion beam column (14) irradiating the sample S using a focused ion beam. The apparatus (10) includes an electrode member (45) provided to be displaced between an insertion position between a beam emitting end portion of the electron beam column (13) and the sample stage (31) and a withdrawal position distant from the insertion position, the electrode member being provided with an electrode penetrating hole passing the electron beam therethrough. The apparatus (10) includes: a driving unit (42) displacing the electrode member (45); a power source (20) applying a negative voltage to the electrode member (45); and an insulation member (43) electrically insulating the sample chamber (11)and the driving unit (42) from the electrode member (45).

    FOCUSED ION BEAM APPARATUS
    2.
    发明申请
    FOCUSED ION BEAM APPARATUS 审中-公开

    公开(公告)号：US20170271122A1

    公开(公告)日：2017-09-21

    申请号：US15461404

    申请日：2017-03-16

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Tsuyoshi OONISHI ,  Toshiyuki IWAHORI

    IPC: H01J37/20 ,  H01J37/26 ,  H01J37/244

    CPC classification number: H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20235 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: Disclosed herein is a focused ion beam apparatus moving a micro sample-piece between the focused ion beam apparatus and a sample observation apparatus by using simple configurations. The focused ion beam apparatus includes: a sample tray on which a sample is placed; a focused ion beam column irradiating the sample with a focused ion beam to obtain a micro sample-piece; a sample chamber receiving the sample tray and the focused ion beam column therein; a side-entry-type carrier being inserted into and removed from the chamber, with a front end side holding the sample-piece; and a sample-piece moving unit moving the sample-piece between the plate and the carrier, wherein the plate is movable on at least X, Y, and Z-axes respectively, and an end of the plate is provided with a carrier engagement part detachably fastened with the carrier, the carrier engagement part being moved with the carrier in company with movement of the plate.

    SAMPLE HOLDER AND CHARGED PARTICLE BEAM DEVICE
    3.
    发明申请
    SAMPLE HOLDER AND CHARGED PARTICLE BEAM DEVICE 有权

    公开(公告)号：US20210090848A1

    公开(公告)日：2021-03-25

    申请号：US17028461

    申请日：2020-09-22

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Toshiyuki IWAHORI

    IPC: H01J37/20

    Abstract: A sample holder (19) includes a base portion (41), a sample carrying portion (42), a rotation guide portion (43), a cooling stage (46), a connection member (47), a first support portion, and a fixing guide portion (48). The base portion (41) is configured to be fixed to a stage (12), which is configured to be driven to rotate by a stage driving mechanism (13). The rotation guide portion (43) is configured to guide synchronous rotation of the base portion (41) and the sample carrying portion (42). The cooling stage (46) is configured to cool a sample (S). The connection member (47) is configured to be connected to the cooling stage (46). The first support portion is configured to support the base portion (41), which is configured to be driven to rotate by the stage (12).

    SAMPLE HOLDER, MEMBER MOUNTING DEVICE, AND CHARGED PARTICLE BEAM APPARATUS
    4.
    发明申请
    SAMPLE HOLDER, MEMBER MOUNTING DEVICE, AND CHARGED PARTICLE BEAM APPARATUS 审中-公开

    公开(公告)号：US20180277336A1

    公开(公告)日：2018-09-27

    申请号：US15936155

    申请日：2018-03-26

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Toshiyuki IWAHORI

    IPC: H01J37/20 ,  H01J37/26

    CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/26 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: Disclosed herein is a sample holder, a member mounting device, and a charged particle beam apparatus, which are able to secure a compatible configuration for the transfer of a sample between different-type charged particle beam apparatuses while preventing an increase in equipment costs, individually or overall. The charged particle beam apparatus (10) includes a holder unit (13) for removably fastening a sample holder (12) for receiving a sample (S), and a sample stage unit (14) for loading the holder unit (13) in a sample chamber (11). The sample holder (12) includes a sample holding member for receiving a sample (S), a support section for supporting the sample holding member, and a clip disposed on the support section at a position where the sample holding member is disposed.

    SAMPLE CARRYING DEVICE AND VACUUM APPARATUS
    7.
    发明申请
    SAMPLE CARRYING DEVICE AND VACUUM APPARATUS 有权
    样品携带装置和真空装置

    公开(公告)号：US20160223434A1

    公开(公告)日：2016-08-04

    申请号：US15005109

    申请日：2016-01-25

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Masakatsu HASUDA ,  Toshiyuki IWAHORI

    IPC: G01N1/14

    CPC classification number: G01N1/14 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/31745

    Abstract: Disclosed herein is a sample carrying device that can easily stow a sample carrying rod in a small space. The sample carrying device includes the sample carrying rod that carries a sample in the left-right direction in a sample compartment and a preparatory sample compartment, a support body that supports the sample carrying rod, a case that supports the support body such that the support body can rotate around a rotational axis perpendicular to the left-right direction, and a third O-ring that is disposed between the support body and the case and seals the sample compartment and the preparatory sample compartment. The sample carrying rod can be switched between the use state where it can carry a sample and the stowed state where it has been moved in the up-down direction from the use state by rotation of the support body.

    Abstract translation: 本文公开了一种可以容易地将样品携带杆收纳在小空间中的样品携带装置。 样品携带装置包括样品携带杆，样品携带杆在样品室中沿左右方向携带样品，准备样品室，支撑样品携带杆的支撑体，支撑支撑体的壳体，使得支撑体 主体可以围绕垂直于左右方向的旋转轴线旋转，以及设置在支撑体和壳体之间并密封样品室和准备样品室的第三O形环。 样品承载杆可以在可携带样品的使用状态和通过支撑体的旋转从使用状态沿上下方向移动的收起状态之间切换。

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