- 专利标题: MAGNETIC INDUCTOR WITH SHAPE ANISOTROPHY
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申请号: US15476147申请日: 2017-03-31
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公开(公告)号: US20180286582A1公开(公告)日: 2018-10-04
- 发明人: Hariklia Deligianni , Bruce B. Doris , Eugene J. O'Sullivan , Naigang Wang
- 申请人: International Business Machines Corporation
- 主分类号: H01F41/02
- IPC分类号: H01F41/02 ; H01F1/147 ; H01F27/24 ; H01F27/28
摘要:
Embodiments are directed to a method of forming a laminated magnetic inductor and resulting structures having anisotropic magnetic layers. A first magnetic stack is formed having one or more magnetic layers alternating with one or more insulating layers. A trench is formed in the first magnetic stack oriented such that an axis of the trench is perpendicular to a hard axis of the magnetic inductor. The trench is filled with a dielectric material.
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