- 专利标题: APPARATUS FOR DIRECT TRANSFER OF SEMICONDUCTOR DEVICE DIE
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申请号: US16000746申请日: 2018-06-05
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公开(公告)号: US20180286838A1公开(公告)日: 2018-10-04
- 发明人: Andrew Huska , Cody Peterson , Clinton Adams , Sean Kupcow
- 申请人: Rohinni, LLC
- 主分类号: H01L25/075
- IPC分类号: H01L25/075 ; H01L21/683 ; H01L21/48 ; H01L23/532 ; H01L21/677 ; H01L21/67 ; H01L21/66 ; G02F1/1335 ; H01L21/68 ; H01L23/544 ; H01L23/00 ; H01L33/62 ; H01L21/687
摘要:
An apparatus for performing a direct transfer of a die. The apparatus includes a first frame to hold the first substrate and a second frame to hold the second substrate. The apparatus further includes a transfer mechanism disposed adjacent to the first frame. The transfer mechanism includes a needle configured to press against the first substrate at a location collinear with the die. A controller, including one or more processors communicatively coupled with the first frame, the second frame, and the transfer mechanism, has executable instructions, which when executed, cause the one or more processors to perform operations including: determining a transfer position of the die on the first substrate via one or more sensors, and aligning the transfer position of the die with the needle of the transfer mechanism via movement of at least two of the first frame, the second frame, and the transfer mechanism.
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