Invention Application
- Patent Title: METHOD AND STRUCTURE FOR PREVENTING SOLDER FLOW INTO A MEMS PRESSURE PORT DURING MEMS DIE ATTACHMENT
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Application No.: US15909431Application Date: 2018-03-01
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Publication No.: US20180319656A1Publication Date: 2018-11-08
- Inventor: Wayne C. Long , Joe A. Ojeda , Joseph L. Nguyen
- Applicant: DunAn Microstaq, Inc.
- Applicant Address: US TX Austin
- Assignee: DunAn Microstaq, Inc.
- Current Assignee: DunAn Microstaq, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: B81C3/00
- IPC: B81C3/00 ; B81C1/00 ; H05K3/34 ; G01K13/02 ; G01K15/00

Abstract:
A method of attaching a MEMS die to a mounting surface includes coating an inside surface of a pressure port of a fluid inlet member with a layer of solder mask, the fluid inlet member having a first axial end, a second axial end, and a port opening of the pressure port formed in the second axial end of the fluid inlet member. A solder preform is disposed on the mounting surface of the fluid inlet member and a MEMS die is disposed on the solder preform. The solder preform is heated in a re-flow operation to attach the MEMS die to the mounting surface, wherein the solder mask within the pressure port prevents molten solder from entering the pressure port during the re-flow operation.
Public/Granted literature
- US10544040B2 Method and structure for preventing solder flow into a MEMS pressure port during MEMS die attachment Public/Granted day:2020-01-28
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