- 专利标题: NOVOLAC RESIN AND RESIST FILM
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申请号: US15779210申请日: 2016-11-17
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公开(公告)号: US20180346635A1公开(公告)日: 2018-12-06
- 发明人: Tomoyuki Imada
- 申请人: DIC Corporation
- 优先权: JP2015-241883 20151211
- 国际申请: PCT/JP2016/084057 WO 20161117
- 主分类号: C08G8/04
- IPC分类号: C08G8/04 ; C08L61/06 ; G03F7/039 ; G03F7/20 ; H01L21/027
摘要:
Provided is a novolac resin having excellent developability, heat resistance, and dry etching resistance, and a resist film. A novolac resin includes a cyclic novolac resin (A) having a molecular structure represented by Structural Formula (1): (in the formula, α is a structural moiety (α) represented by Structural Formula (2): n is an integer of 2 to 10), in which at least one of X's present in the resin is any one of a tertiary alkyl group, an alkoxyalkyl group, an acyl group, an alkoxycarbonyl group, a hetero atom-containing cyclic hydrocarbon group, and a trialkylsilyl group, at least one of the structural moieties (α) present in the resin is a structural moiety (α1) in which l is 1, and at least one thereof is a structural moiety (α2) in which l is 2.
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