- 专利标题： MASKING DEVICE FOR USE IN A LITHIUM DEPOSITION PROCESS IN THE MANUFACTURING OF THIN FILM BATTERIES, APPARATUS CONFIGURED FOR A LITHIUM DEPOSITION PROCESS, METHOD FOR MANUFACTURING ELECTRODES OF THIN FILM BATTERIES, AND THIN FILM BATTERY
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申请号： US15570988申请日： 2015-05-15
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公开(公告)号： US20180351164A1公开(公告)日： 2018-12-06
- 发明人: Anke HELLMICH , Thomas Werner ZILBAUER , Jose Manuel DIEGUEZ-CAMPO , Stefan KELLER , Georg JOST
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara US CA Santa Clara
- 专利权人： Applied Materials, Inc.,Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.,Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara US CA Santa Clara
- 国际申请： PCT/IB2015/000695 WO 20150515
- 主分类号： H01M4/1395
- IPC分类号： H01M4/1395 ; H01M4/04 ; H01M4/38 ; H01M4/40 ; H01M10/052 ; H01M6/40
摘要：
The present disclosure provides a masking device for use in a lithium deposition process in the manufacturing of thin film batteries. The masking device includes a mask portion made of a metal or metal alloy, and one or more openings in the mask portion, wherein the one or more openings are configured to allow particles of a deposition material to pass through the mask portion, and wherein a size of each opening of the one or more openings, is at least 0.5 cm2.
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