- 专利标题： ACOUSTIC RESONATOR AND METHOD FOR FABRICATING THE SAME
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申请号： US15875207申请日： 2018-01-19
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公开(公告)号： US20180351533A1公开(公告)日： 2018-12-06
- 发明人: Tae Kyung LEE , Jun LIM , Jong Woon KIM , Ran Hee SHIN , Sung Sun KIM
- 申请人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 申请人地址： KR Suwon-si
- 专利权人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人地址： KR Suwon-si
- 优先权： KR10-2017-0066487 20170530; KR10-2017-0103830 20170816
- 主分类号： H03H9/17
- IPC分类号： H03H9/17 ; H03H9/13 ; H03H3/02
摘要：
An acoustic resonator includes a membrane layer disposed on an insulating layer; a cavity formed by the insulating layer and the membrane layer; a resonating portion disposed on the cavity and having a first electrode, a piezoelectric layer, and a second electrode stacked thereon; a protective layer disposed on the resonating portion; and a hydrophobic layer formed on the protective layer.
公开/授权文献
- US10965271B2 Acoustic resonator and method for fabricating the same 公开/授权日：2021-03-30
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