Abstract:
Embodiments of the invention provide an angular velocity sensor, including a mass body, a first frame disposed at an outside of the mass body, a first flexible part connecting the mass body to the first frame, and a second flexible part connecting the mass body to the first frame. The angular velocity sensor further includes a second frame disposed at the outside of the first frame, a third flexible part connecting the first frame to the second frame, and a fourth flexible part connecting the first frame to the second frame. According to at least one embodiment, the first flexible part is connected to be displaced depending on a movement of the mass body, the second flexible part is fixed to the first frame to rotatably displace the mass body, and the third flexible part is fixed to the second frame to rotatably displace the first frame and is formed in pair which is adjacent and opposite to each other.
Abstract:
An acoustic resonator includes a membrane layer disposed on an insulating layer; a cavity formed by the insulating layer and the membrane layer; a resonating portion disposed on the cavity and having a first electrode, a piezoelectric layer, and a second electrode stacked thereon; a protective layer disposed on the resonating portion; and a hydrophobic layer formed on the protective layer.
Abstract:
A signal processing apparatus includes: a clock generator configured to generate a clock signal having a phase based on a phase of an input signal; a phase modulator configured to shift the phase of the clock signal to generate a phase-shifted clock signal; and a signal synthesizer configured to synthesize the phase-shifted clock signal and the input signal to generate a synthesized signal, wherein the phase modulator is configured to determine a value by which to shift the phase of the clock signal based on an amplitude of the input signal and an amplitude of noise included in the input signal.